Assignee
SHINDOU TAKEHIRO
JP·2 granted patents·2 citations·filing 2009–2010
Top patents by PatentIndex Score
2 records- 0159US8506718B2Polymer removing apparatus and methodSHINDOU TAKEHIRO·Filed 2010·Granted Aug 13, 2013·2 cites·14 claims
- 0242US8497132B2Ozone gas concentration measurement method, ozone gas concentration measurement system, and substrate processing apparatusSHINDOU TAKEHIRO·Filed 2009·Granted Jul 30, 2013·0 cites·5 claims
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