Assignee
SHIH HER TECHNOLOGIES INC
TW·1 granted patent·1 pending application·0 citations·filing 2009–2013
Top patents by PatentIndex Score
2 records- 0136US2009311145A1Reaction chamber structural parts with thermal spray ceramic coating and method for forming the ceramic coating thereofSHIH HER TECHNOLOGIES INC·Filed 2009·Application pending·0 cites
- 0219US9109283B2Structure of reaction chamber of semiconductor sputtering equipmentSHIH HER TECHNOLOGIES INC·Filed 2013·Granted Aug 18, 2015·0 cites·10 claims
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