Assignee
SHIBAZAKI YUICHI
JP·76 granted patents·5 pending applications·338 citations·filing 2005–2012
Top patents by PatentIndex Score
81 records- 0199US8203697B2Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2011·Granted Jun 19, 2012·29 cites·10 claims
- 0298US8134688B2Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration methodSHIBAZAKI YUICHI·Filed 2007·Granted Mar 13, 2012·45 cites·29 claims
- 0397US8675171B2Movable body drive system and movable body drive method, pattern formation apparatus and method, exposure apparatus and method, device manufacturing method, and decision-making methodSHIBAZAKI YUICHI·Filed 2007·Granted Mar 18, 2014·32 cites·27 claims
- 0495US9423703B2Exposure apparatus and device manufacturing method measuring position of substrate stage using at least three of four encoder headsSHIBAZAKI YUICHI·Filed 2011·Granted Aug 23, 2016·7 cites·33 claims
- 0595US8514395B2Exposure method, exposure apparatus, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2010·Granted Aug 20, 2013·12 cites·31 claims
- 0693US8937710B2Exposure method and apparatus compensating measuring error of encoder due to grating section and displacement of movable body in Z directionSHIBAZAKI YUICHI·Filed 2012·Granted Jan 20, 2015·5 cites·39 claims
- 0793US8553203B2Stage drive method and stage unit, exposure apparatus, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2009·Granted Oct 8, 2013·7 cites·31 claims
- 0891US9223225B2Liquid immersion member, exposure apparatus, exposure method, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2010·Granted Dec 29, 2015·7 cites·23 claims
- 0991US8908145B2Pattern forming apparatus and pattern forming method, movable body drive system and movable body drive method, exposure apparatus and exposure method, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2007·Granted Dec 9, 2014·8 cites·42 claims
- 1091US8493547B2Exposure apparatus, exposure method, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2010·Granted Jul 23, 2013·8 cites·22 claims
- 1190US8711327B2Exposure apparatus, exposure method, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2008·Granted Apr 29, 2014·12 cites·79 claims
- 1290US8514373B2Movable body system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2010·Granted Aug 20, 2013·8 cites·85 claims
- 1389US9423702B2Exposure apparatus, exposure method, and device manufacturing method measuring position of substrate stage by switching between encoder and interferometerSHIBAZAKI YUICHI·Filed 2010·Granted Aug 23, 2016·3 cites·44 claims
- 1489US8264669B2Movable body drive method, pattern formation method, exposure method, and device manufacturing method for maintaining position coordinate before and after switching encoder headSHIBAZAKI YUICHI·Filed 2008·Granted Sep 11, 2012·9 cites·14 claims
- 1588US8947639B2Exposure method and apparatus measuring position of movable body based on information on flatness of encoder grating sectionSHIBAZAKI YUICHI·Filed 2012·Granted Feb 3, 2015·3 cites·80 claims
- 1687US9081301B2Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration methodSHIBAZAKI YUICHI·Filed 2012·Granted Jul 14, 2015·4 cites·69 claims
- 1787US8902402B2Movable body apparatus, exposure apparatus, exposure method, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2009·Granted Dec 2, 2014·13 cites·56 claims
- 1887US8325326B2Stage unit, exposure apparatus, and exposure methodSHIBAZAKI YUICHI·Filed 2010·Granted Dec 4, 2012·5 cites·36 claims
- 1987US8325325B2Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2009·Granted Dec 4, 2012·7 cites·36 claims
- 2085US9229333B2Exposure apparatus, movable body drive system, pattern formation apparatus, exposure method, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2008·Granted Jan 5, 2016·5 cites·60 claims
- 2185US8773635B2Exposure apparatus, exposure method, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2009·Granted Jul 8, 2014·7 cites·30 claims
- 2283US8432534B2Holding apparatus, position detection apparatus and exposure apparatus, moving method, position detection method, exposure method, adjustment method of detection system and device manufacturing methodSHIBAZAKI YUICHI·Filed 2009·Granted Apr 30, 2013·6 cites·73 claims
- 2382US8705008B2Substrate holding unit, exposure apparatus having same, exposure method, method for producing device, and liquid repellant plateSHIBAZAKI YUICHI·Filed 2005·Granted Apr 22, 2014·7 cites·38 claims
- 2482US8488106B2Movable body drive method, movable body apparatus, exposure method, exposure apparatus, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2010·Granted Jul 16, 2013·9 cites·64 claims
- 2581US8970820B2Object exchange method, exposure method, carrier system, exposure apparatus, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2010·Granted Mar 3, 2015·4 cites·27 claims
- 2681US8717543B2Substrate holder, stage apparatus, and exposure apparatus with first support part provided in a suction space and second support partSHIBAZAKI YUICHI·Filed 2010·Granted May 6, 2014·4 cites·21 claims
- 2781US8547528B2Stage drive method and stage unit, exposure apparatus, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2009·Granted Oct 1, 2013·2 cites·35 claims
- 2881US8164736B2Exposure method, exposure apparatus, and method for producing deviceSHIBAZAKI YUICHI·Filed 2008·Granted Apr 24, 2012·5 cites·72 claims
- 2980US8724079B2Stage drive method and stage unit, exposure apparatus, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2010·Granted May 13, 2014·1 cites·81 claims
- 3080US8711328B2Stage drive method and stage unit, exposure apparatus, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2010·Granted Apr 29, 2014·1 cites·74 claims
- 3179US8854632B2Pattern forming apparatus, mark detecting apparatus, exposure apparatus, pattern forming method, exposure method, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2011·Granted Oct 7, 2014·3 cites·49 claims
- 3279US8115906B2Movable body system, pattern formation apparatus, exposure apparatus and measurement device, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2008·Granted Feb 14, 2012·5 cites·19 claims
- 3377US8553204B2Movable body apparatus, exposure apparatus, exposure method, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2010·Granted Oct 8, 2013·2 cites·39 claims
- 3477US8411271B2Pattern forming method, pattern forming apparatus, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2006·Granted Apr 2, 2013·4 cites·127 claims
- 3576US9103700B2Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2011·Granted Aug 11, 2015·1 cites·21 claims
- 3676US8253929B2Stage apparatus, fixation method, exposure apparatus, exposure method, and device-producing methodSHIBAZAKI YUICHI·Filed 2008·Granted Aug 28, 2012·3 cites·12 claims
- 3775US8237916B2Movable body drive system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2008·Granted Aug 7, 2012·3 cites·16 claims
- 3875US8070145B2Holding unit, assembly system, sputtering unit, and processing method and processing unitSHIBAZAKI YUICHI·Filed 2006·Granted Dec 6, 2011·3 cites·8 claims
- 3973US8792084B2Exposure apparatus, exposure method, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2010·Granted Jul 29, 2014·3 cites·40 claims
- 4073US8488109B2Exposure method, exposure apparatus, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2010·Granted Jul 16, 2013·2 cites·42 claims
- 4173US8279399B2Exposure apparatus, exposure method, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2008·Granted Oct 2, 2012·3 cites·81 claims
- 4271US9665016B2Lithographic apparatus and method having substrate table and sensor table to hold immersion liquidSHIBAZAKI YUICHI·Filed 2010·Granted May 30, 2017·1 cites·22 claims
- 4371US8994923B2Movable body apparatus, exposure apparatus, exposure method, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2009·Granted Mar 31, 2015·3 cites·48 claims
- 4470US8582084B2Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, position control method and position control system, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2012·Granted Nov 12, 2013·1 cites·44 claims
- 4570US8237919B2Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method for continuous position measurement of movable body before and after switching between sensor headsSHIBAZAKI YUICHI·Filed 2008·Granted Aug 7, 2012·2 cites·19 claims
- 4669US8767182B2Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2011·Granted Jul 1, 2014·1 cites·23 claims
- 4769US8760629B2Exposure apparatus including positional measurement system of movable body, exposure method of exposing object including measuring positional information of movable body, and device manufacturing method that includes exposure method of exposing object, including measuring positional information of movable bodySHIBAZAKI YUICHI·Filed 2009·Granted Jun 24, 2014·3 cites·38 claims
- 4868US8218129B2Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, measuring method, and position measurement systemSHIBAZAKI YUICHI·Filed 2008·Granted Jul 10, 2012·2 cites·24 claims
- 4967US8891064B2Moving body apparatus and exposure apparatusSHIBAZAKI YUICHI·Filed 2009·Granted Nov 18, 2014·2 cites·21 claims
- 5067US8797508B2Exposure apparatus, exposure method, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2008·Granted Aug 5, 2014·2 cites·66 claims
Showing the top 50 of 81 patent records by PatentIndex Score.
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