Assignee
SHAREEF IQBAL
US·3 granted patents·24 citations·filing 2008–2012
Top patents by PatentIndex Score
3 records- 0188US9091397B2Shared gas panels in plasma processing chambers employing multi-zone gas feedsSHAREEF IQBAL·Filed 2012·Granted Jul 28, 2015·5 cites·10 claims
- 0287US8794267B2Gas transport delay resolution for short etch recipesSHAREEF IQBAL·Filed 2008·Granted Aug 5, 2014·17 cites·16 claims
- 0368US10002747B2Methods and apparatus for supplying process gas in a plasma processing systemSHAREEF IQBAL·Filed 2012·Granted Jun 19, 2018·2 cites·11 claims
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