Assignee
SETSUHARA YUICHI
JP·3 granted patents·6 pending applications·3 citations·filing 2008–2011
Top patents by PatentIndex Score
9 records- 0163US9078336B2Radio-frequency antenna unit and plasma processing apparatusSETSUHARA YUICHI·Filed 2009·Granted Jul 7, 2015·1 cites·12 claims
- 0263US8916034B2Thin-film forming sputtering systemSETSUHARA YUICHI·Filed 2009·Granted Dec 23, 2014·2 cites·10 claims
- 0344US8931433B2Plasma processing apparatusSETSUHARA YUICHI·Filed 2008·Granted Jan 13, 2015·0 cites·12 claims
- 0437US2013220548A1Plasma processing deviceSETSUHARA YUICHI·Filed 2011·Application pending·0 cites
- 0537US2014216928A1Thin-film formation sputtering deviceSETSUHARA YUICHI·Filed 2011·Application pending·0 cites
- 0636US2014210337A1Antenna for plasma processing device, and plasma processing device using the sameSETSUHARA YUICHI·Filed 2011·Application pending·0 cites
- 0735US2012031563A1Plasma processing deviceSETSUHARA YUICHI·Filed 2010·Application pending·0 cites
- 0835US2013192759A1Plasma processing deviceSETSUHARA YUICHI·Filed 2011·Application pending·0 cites
- 0934US2012031562A1Plasma processing apparatusSETSUHARA YUICHI·Filed 2010·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →