Assignee
SEMITEX CO LTD
JP·3 granted patents·79 citations·filing 1990–1991
Technology mixG01R3
Top patents by PatentIndex Score
3 records- 0168US5047713AMethod and apparatus for measuring a deep impurity level of a semiconductor crystalSEMITEX CO LTD·Filed 1990·Granted Sep 10, 1991·35 cites·10 claims
- 0262US5081414AMethod for measuring lifetime of semiconductor material and apparatus thereforSEMITEX CO LTD·Filed 1990·Granted Jan 14, 1992·26 cites·17 claims
- 0348US5138255AMethod and apparatus for measuring lifetime of semiconductor material including waveguide tuning meansSEMITEX CO LTD·Filed 1991·Granted Aug 11, 1992·18 cites·6 claims
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