Assignee
SEMIFAB INC
US·11 granted patents·769 citations·filing 1989–2001
Top patents by PatentIndex Score
11 records- 0195US6368411B2Molecular contamination control systemSEMIFAB INC·Filed 2001·Granted Apr 9, 2002·104 cites·3 claims
- 0294US5879458AMolecular contamination control systemSEMIFAB INC·Filed 1996·Granted Mar 9, 1999·168 cites·26 claims
- 0392US6187182B1Filter cartridge assembly for a gas purging systemSEMIFAB INC·Filed 1998·Granted Feb 13, 2001·80 cites·9 claims
- 0490US6042651AMolecular contamination control systemSEMIFAB INC·Filed 1999·Granted Mar 28, 2000·82 cites·6 claims
- 0588US6221163B1Molecular contamination control systemSEMIFAB INC·Filed 1999·Granted Apr 24, 2001·70 cites·4 claims
- 0686US4977688AVapor device and method for drying articles such as semiconductor wafers with substances such as isopropyl alcoholSEMIFAB INC·Filed 1989·Granted Dec 18, 1990·62 cites·30 claims
- 0782US5115576AVapor device and method for drying articles such as semiconductor wafers with substances such as isopropyl alcoholSEMIFAB INC·Filed 1990·Granted May 26, 1992·81 cites·15 claims
- 0878US5315766AVapor device and method for drying articles such as semiconductor wafers with substances such as isopropyl alcoholSEMIFAB INC·Filed 1992·Granted May 31, 1994·55 cites·20 claims
- 0964US5848933ADocking and environmental purging system for integrated circuit wafer transport assembliesSEMIFAB INC·Filed 1997·Granted Dec 15, 1998·24 cites·6 claims
- 1052US6120371ADocking and environmental purging system for integrated circuit wafer transport assembliesSEMIFAB INC·Filed 1998·Granted Sep 19, 2000·14 cites·6 claims
- 1151US6168085B1System and method for cascade control of temperature and humidity for semi-conductor manufacturing environmentsSEMIFAB INC·Filed 1999·Granted Jan 2, 2001·29 cites·19 claims
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