Assignee
SEMICONDUCTOR LEADING EDGE TEC
JP·18 granted patents·35 pending applications·564 citations·filing 1998–2008
Top patents by PatentIndex Score
53 records- 0195US6586163B1Method of forming fine patternSEMICONDUCTOR LEADING EDGE TEC·Filed 2000·Granted Jul 1, 2003·212 cites·12 claims
- 0292US6817822B2Load port, wafer processing apparatus, and method of replacing atmosphereSEMICONDUCTOR LEADING EDGE TEC·Filed 2002·Granted Nov 16, 2004·68 cites·2 claims
- 0390US6473996B1Load port system for substrate processing system, and method of processing substrateSEMICONDUCTOR LEADING EDGE TEC·Filed 2000·Granted Nov 5, 2002·54 cites·13 claims
- 0489US6808352B2Method for transporting boards, load port apparatus, and board transport systemSEMICONDUCTOR LEADING EDGE TEC·Filed 2002·Granted Oct 26, 2004·78 cites·6 claims
- 0584US6716761B2Method of forming fine patternsSEMICONDUCTOR LEADING EDGE TEC·Filed 2001·Granted Apr 6, 2004·38 cites·6 claims
- 0682US6535781B1Apparatus for modifying coordinatesSEMICONDUCTOR LEADING EDGE TEC·Filed 2000·Granted Mar 18, 2003·18 cites·7 claims
- 0778US6726799B2Plasma etching apparatus with focus ring and plasma etching methodSEMICONDUCTOR LEADING EDGE TEC·Filed 2001·Granted Apr 27, 2004·22 cites·6 claims
- 0868US6881657B2Semiconductor device and method for manufacturing semiconductor deviceSEMICONDUCTOR LEADING EDGE TEC·Filed 2004·Granted Apr 19, 2005·13 cites·14 claims
- 0968US6355545B1Method and apparatus for wiring, wire, and integrated circuitSEMICONDUCTOR LEADING EDGE TEC·Filed 2000·Granted Mar 12, 2002·13 cites·3 claims
- 1063US6769908B2Wafer heat-treatment system and wafer heat-treatment methodSEMICONDUCTOR LEADING EDGE TEC·Filed 2002·Granted Aug 3, 2004·11 cites·16 claims
- 1159US2006010091A1Solution search apparatus and initial value setting method thereofSEMICONDUCTOR LEADING EDGE TEC·Filed 2004·Application pending·0 cites
- 1253US6875971B2Wafer edge exposure apparatus, and wafer edge exposure methodSEMICONDUCTOR LEADING EDGE TEC·Filed 2002·Granted Apr 5, 2005·6 cites·12 claims
- 1352US2008274605A1Method of manufacturing silicon nitride film, method of manufacturing semiconductor device, and semiconductor deviceSEMICONDUCTOR LEADING EDGE TEC·Filed 2008·Application pending·0 cites
- 1451US6446645B1Dip cleaning system for a substrate, system for evaluating the amount of particles and method of evaluating the amount of particles adhering to a substrateSEMICONDUCTOR LEADING EDGE TEC·Filed 2000·Granted Sep 10, 2002·5 cites·10 claims
- 1550US6880563B2Apparatus and method of cleaning a substrateSEMICONDUCTOR LEADING EDGE TEC·Filed 2002·Granted Apr 19, 2005·2 cites·5 claims
- 1649US6379219B1Chemical mechanical polishing machine and chemical mechanical polishing methodSEMICONDUCTOR LEADING EDGE TEC·Filed 2000·Granted Apr 30, 2002·6 cites·17 claims
- 1748US2005155623A1Apparatus and method of cleaning a substrateSEMICONDUCTOR LEADING EDGE TEC·Filed 2005·Application pending·0 cites
- 1847US6731375B2Projection aligner, exposing method and semiconductor deviceSEMICONDUCTOR LEADING EDGE TEC·Filed 2001·Granted May 4, 2004·2 cites·9 claims
- 1946US2005132961A1Catalytic CVD equipment, method for catalytic CVD, and method for manufacturing semiconductor deviceSEMICONDUCTOR LEADING EDGE TEC·Filed 2004·Application pending·0 cites
- 2044US2005249876A1Film forming apparatus and methodSEMICONDUCTOR LEADING EDGE TEC·Filed 2005·Application pending·0 cites
- 2142US2004209194A1Ultraviolet-light radiating apparatus, wet etching apparatus and wet etching method using ultravioletlight, and method of manufacturing semiconductor deviceSEMICONDUCTOR LEADING EDGE TEC·Filed 2004·Application pending·0 cites
- 2241US2006019173A1Method of designing charged particle beam mask, charged particle beam mask, and charged particle beam transfer methodSEMICONDUCTOR LEADING EDGE TEC·Filed 2004·Application pending·0 cites
- 2340US6803170B2Resist composition and method for manufacturing semiconductor device using the resist compositionSEMICONDUCTOR LEADING EDGE TEC·Filed 2001·Granted Oct 12, 2004·6 cites·21 claims
- 2440US2005170102A1Method for manufacturing semiconductor deviceSEMICONDUCTOR LEADING EDGE TEC·Filed 2005·Application pending·0 cites
- 2540US2005253269A1Semiconductor deviceSEMICONDUCTOR LEADING EDGE TEC·Filed 2004·Application pending·0 cites
- 2640US2005199586A1Resist removal method and semiconductor device manufactured by using the sameSEMICONDUCTOR LEADING EDGE TEC·Filed 2005·Application pending·0 cites
- 2740US2006019175A1Method of manufacturing membrane mask, method of manufacturing semiconductor device, and membrane maskSEMICONDUCTOR LEADING EDGE TEC·Filed 2005·Application pending·0 cites
- 2840US2005167788A1Semiconductor device and method of manufacturing sameSEMICONDUCTOR LEADING EDGE TEC·Filed 2004·Application pending·0 cites
- 2940US2004198068A1Method for manufacturing semiconductor deviceSEMICONDUCTOR LEADING EDGE TEC·Filed 2004·Application pending·0 cites
- 3040US2005202323A1Phase shift mask and method of manufacturing phase shift maskSEMICONDUCTOR LEADING EDGE TEC·Filed 2004·Application pending·0 cites
- 3139US2005170641A1Multilayered wiring structure, method of forming buried wiring, semiconductor device, method of manufacturing semiconductor device, semiconductor mounted device, and method of manufacturing semiconductor mounted deviceSEMICONDUCTOR LEADING EDGE TEC·Filed 2004·Application pending·0 cites
- 3239US2005051845A1Semiconductor device and manufacturing method thereforSEMICONDUCTOR LEADING EDGE TEC·Filed 2004·Application pending·0 cites
- 3339US2005095539A1Exposure methodSEMICONDUCTOR LEADING EDGE TEC·Filed 2004·Application pending·0 cites
- 3439US2005153536A1Method for manufacturing semiconductor deviceSEMICONDUCTOR LEADING EDGE TEC·Filed 2004·Application pending·0 cites
- 3539US2005181304A1Method of forming fine patternSEMICONDUCTOR LEADING EDGE TEC·Filed 2005·Application pending·0 cites
- 3639US2005121786A1Semiconductor device and its manufacturing methodSEMICONDUCTOR LEADING EDGE TEC·Filed 2004·Application pending·0 cites
- 3739US2005048774A1Method for manufacturing semiconductor deviceSEMICONDUCTOR LEADING EDGE TEC·Filed 2004·Application pending·0 cites
- 3838US2005167767A1Semiconductor apparatus and manufacturing method of the sameSEMICONDUCTOR LEADING EDGE TEC·Filed 2005·Application pending·0 cites
- 3938US2006003577A1Method of manufacturing a semiconductor deviceSEMICONDUCTOR LEADING EDGE TEC·Filed 2005·Application pending·0 cites
- 4038US2004211756A1Wet etching apparatus and wet etching method using ultraviolet lightSEMICONDUCTOR LEADING EDGE TEC·Filed 2004·Application pending·0 cites
- 4138US2004150075A1Semiconductor device with cupper wiring and method for manufacturing semiconductor deviceSEMICONDUCTOR LEADING EDGE TEC·Filed 2003·Application pending·0 cites
- 4238US2004188675A1Semiconductor device and method of manufacturing the sameSEMICONDUCTOR LEADING EDGE TEC·Filed 2004·Application pending·0 cites
- 4338US2005045938A1Semiconductor device with silicon-germanium gate electrode and method for manufacturing thereofSEMICONDUCTOR LEADING EDGE TEC·Filed 2004·Application pending·0 cites
- 4437US2005205940A1Semiconductor device and method for manufacturing the sameSEMICONDUCTOR LEADING EDGE TEC·Filed 2004·Application pending·0 cites
- 4537US2005082605A1Semiconductor device and method for manufacturing semiconductor deviceSEMICONDUCTOR LEADING EDGE TEC·Filed 2004·Application pending·0 cites
- 4636US2005051857A1Semiconductor deviceSEMICONDUCTOR LEADING EDGE TEC·Filed 2004·Application pending·0 cites
- 4736US2005267851A1Fitness function circuit, genetic algorithm machine, and fitness evaluation methodSEMICONDUCTOR LEADING EDGE TEC·Filed 2005·Application pending·0 cites
- 4836US2004059033A1Composition for anti-reflective coating and method for manufacturing semiconductor deviceSEMICONDUCTOR LEADING EDGE TEC·Filed 2003·Application pending·0 cites
- 4935US2005181576A1Method for forming inorganic porus filmSEMICONDUCTOR LEADING EDGE TEC·Filed 2003·Application pending·0 cites
- 5034US6943899B2Substrate-container measuring device, and substrate-container measuring jigSEMICONDUCTOR LEADING EDGE TEC·Filed 2002·Granted Sep 13, 2005·0 cites·14 claims
Showing the top 50 of 53 patent records by PatentIndex Score.
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