Assignee
SEMATECH INC
US·71 granted patents·17 pending applications·4,770 citations·filing 1990–2014
Top patents by PatentIndex Score
88 records- 0199US5062446AIntelligent mass flow controllerSEMATECH INC·Filed 1991·Granted Nov 5, 1991·306 cites·18 claims
- 0298US5674787ASelective electroless copper deposited interconnect plugs for ULSI applicationsSEMATECH INC·Filed 1996·Granted Oct 7, 1997·838 cites·32 claims
- 0398US5474865AGlobally planarized binary optical mask using buried absorbersSEMATECH INC·Filed 1994·Granted Dec 12, 1995·163 cites·20 claims
- 0497US6037664ADual damascene interconnect structure using low dielectric constant material for an inter-level dielectric layerSEMATECH INC·Filed 1998·Granted Mar 14, 2000·306 cites·26 claims
- 0596US6100184AMethod of making a dual damascene interconnect structure using low dielectric constant material for an inter-level dielectric layerSEMATECH INC·Filed 1997·Granted Aug 8, 2000·236 cites·12 claims
- 0696US5770982ASelf isolating high frequency saturable reactorSEMATECH INC·Filed 1996·Granted Jun 23, 1998·130 cites·21 claims
- 0796US5504328AEndpoint detection utilizing ultraviolet mass spectrometrySEMATECH INC·Filed 1994·Granted Apr 2, 1996·111 cites·21 claims
- 0895US5840629ACopper chemical mechanical polishing slurry utilizing a chromate oxidantSEMATECH INC·Filed 1995·Granted Nov 24, 1998·231 cites·21 claims
- 0994US7332433B2Methods of modulating the work functions of film layersSEMATECH INC·Filed 2005·Granted Feb 19, 2008·31 cites·10 claims
- 1094US5866031ASlurry formulation for chemical mechanical polishing of metalsSEMATECH INC·Filed 1996·Granted Feb 2, 1999·108 cites·25 claims
- 1193US5364510AScheme for bath chemistry measurement and control for improved semiconductor wet processingSEMATECH INC·Filed 1993·Granted Nov 15, 1994·147 cites·11 claims
- 1293US5325019AControl of plasma process by use of harmonic frequency components of voltage and currentSEMATECH INC·Filed 1992·Granted Jun 28, 1994·110 cites·12 claims
- 1392US5159264APneumatic energy fluxmeterSEMATECH INC·Filed 1991·Granted Oct 27, 1992·82 cites·10 claims
- 1491US7736954B2Methods for nanoscale feature imprint moldingSEMATECH INC·Filed 2006·Granted Jun 15, 2010·56 cites·20 claims
- 1591US7595204B2Methods and systems for determining trapped charge density in filmsSEMATECH INC·Filed 2006·Granted Sep 29, 2009·20 cites·17 claims
- 1691US5846398ACMP slurry measurement and control techniqueSEMATECH INC·Filed 1996·Granted Dec 8, 1998·110 cites·22 claims
- 1791US5480747AAttenuated phase shifting mask with buried absorbersSEMATECH INC·Filed 1994·Granted Jan 2, 1996·75 cites·26 claims
- 1891US5472561ARadio frequency monitor for semiconductor process controlSEMATECH INC·Filed 1995·Granted Dec 5, 1995·136 cites·8 claims
- 1990US7250620B2EUV lithography filterSEMATECH INC·Filed 2005·Granted Jul 31, 2007·20 cites·38 claims
- 2090US5439569AConcentration measurement and control of hydrogen peroxide and acid/base component in a semiconductor bathSEMATECH INC·Filed 1994·Granted Aug 8, 1995·95 cites·19 claims
- 2189US5614444AMethod of using additives with silica-based slurries to enhance selectivity in metal CMPSEMATECH INC·Filed 1995·Granted Mar 25, 1997·133 cites·14 claims
- 2289US5467013ARadio frequency monitor for semiconductor process controlSEMATECH INC·Filed 1993·Granted Nov 14, 1995·134 cites·10 claims
- 2388US7580138B2Methods and systems for characterizing semiconductor materialsSEMATECH INC·Filed 2005·Granted Aug 25, 2009·14 cites·20 claims
- 2488US5344365AIntegrated building and conveying structure for manufacturing under ultraclean conditionsSEMATECH INC·Filed 1993·Granted Sep 6, 1994·175 cites·23 claims
- 2588US5159267APneumatic energy fluxmeterSEMATECH INC·Filed 1992·Granted Oct 27, 1992·84 cites·9 claims
- 2684US5479340AReal time control of plasma etch utilizing multivariate statistical analysisSEMATECH INC·Filed 1993·Granted Dec 26, 1995·145 cites·10 claims
- 2782US9029218B2Tunneling field-effect transistor with direct tunneling for enhanced tunneling currentSEMATECH INC·Filed 2013·Granted May 12, 2015·6 cites·4 claims
- 2882US5562530APulsed-force chemical mechanical polishingSEMATECH INC·Filed 1994·Granted Oct 8, 1996·62 cites·10 claims
- 2981US8829567B2Metal alloy with an abrupt interface to III-V semiconductorSEMATECH INC·Filed 2012·Granted Sep 9, 2014·6 cites·19 claims
- 3081US5881208AHeater and temperature sensor array for rapid thermal processing thermal coreSEMATECH INC·Filed 1995·Granted Mar 9, 1999·67 cites·29 claims
- 3181US5418095AMethod of fabricating phase shifters with absorbing/attenuating sidewalls using an additive processSEMATECH INC·Filed 1994·Granted May 23, 1995·43 cites·16 claims
- 3279US5472811APhase shifting mask structure with multilayer optical coating for improved transmissionSEMATECH INC·Filed 1994·Granted Dec 5, 1995·39 cites·14 claims
- 3379US5411824APhase shifting mask structure with absorbing/attenuating sidewalls for improved imagingSEMATECH INC·Filed 1994·Granted May 2, 1995·38 cites·16 claims
- 3478US7629556B2Laser nozzle methods and apparatus for surface cleaningSEMATECH INC·Filed 2006·Granted Dec 8, 2009·7 cites·18 claims
- 3577US7760341B2Systems and methods for in-situ reflectivity degradation monitoring of optical collectors used in extreme ultraviolet (EUV) lithography processesSEMATECH INC·Filed 2007·Granted Jul 20, 2010·5 cites·14 claims
- 3677US7709816B2Systems and methods for monitoring and controlling the operation of extreme ultraviolet (EUV) light sources used in semiconductor fabricationSEMATECH INC·Filed 2007·Granted May 4, 2010·5 cites·19 claims
- 3777US5867020ACapacitively coupled RF voltage probe having optimized flux linkageSEMATECH INC·Filed 1996·Granted Feb 2, 1999·48 cites·17 claims
- 3877US5211729ABaffle/settling chamber for a chemical vapor deposition equipmentSEMATECH INC·Filed 1991·Granted May 18, 1993·50 cites·10 claims
- 3976US7855139B2Systems and methods for controlling the effective dielectric constant of materials used in a semiconductor deviceSEMATECH INC·Filed 2007·Granted Dec 21, 2010·7 cites·16 claims
- 4074US8366431B2Partial die process for uniform etch loading of imprint wafersSEMATECH INC·Filed 2010·Granted Feb 5, 2013·5 cites·8 claims
- 4172US5074421AQuartz tube storage deviceSEMATECH INC·Filed 1990·Granted Dec 24, 1991·53 cites·15 claims
- 4271US5466991AOptimized ECR plasma apparatus with varied microwave window thicknessSEMATECH INC·Filed 1994·Granted Nov 14, 1995·23 cites·6 claims
- 4370US5834931ARF current sensorSEMATECH INC·Filed 1996·Granted Nov 10, 1998·37 cites·21 claims
- 4468US5555902ASubmicron particle removal using liquid nitrogenSEMATECH INC·Filed 1995·Granted Sep 17, 1996·35 cites·8 claims
- 4567US5660706AElectric field initiated electroless metal depositionSEMATECH INC·Filed 1996·Granted Aug 26, 1997·33 cites·22 claims
- 4667US5264040ARapid-switching rotating disk reactorSEMATECH INC·Filed 1992·Granted Nov 23, 1993·24 cites·10 claims
- 4766US7921859B2Method and apparatus for an in-situ ultraviolet cleaning toolSEMATECH INC·Filed 2005·Granted Apr 12, 2011·2 cites·17 claims
- 4866US5306985AECR apparatus with magnetic coil for plasma refractive index controlSEMATECH INC·Filed 1992·Granted Apr 26, 1994·18 cites·6 claims
- 4964US8574480B2Partial die process for uniform etch loading of imprint wafersSEMATECH INC·Filed 2013·Granted Nov 5, 2013·2 cites·12 claims
- 5063US7772710B2Zero-order overlay targetsSEMATECH INC·Filed 2007·Granted Aug 10, 2010·5 cites·19 claims
Showing the top 50 of 88 patent records by PatentIndex Score.
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