Individual holder
SCHRAM RICHARD R
US·3 granted patents·263 citations·filing 1983–1988
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
3 records- 0188US4818169AAutomated wafer inspection systemSCHRAM RICHARD R·Filed 1985·Granted Apr 4, 1989·196 cites·24 claims
- 0278US4938654AAutomated wafer inspection systemSCHRAM RICHARD R·Filed 1988·Granted Jul 3, 1990·64 cites·3 claims
- 0328US5048966AApparatus and system for linewidth measurementsSCHRAM RICHARD R·Filed 1983·Granted Sep 17, 1991·3 cites·8 claims
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