Assignee
SCHOTT LITHOTEC AG
DE·3 granted patents·44 citations·filing 2001–2002
Top patents by PatentIndex Score
3 records- 0187US6797439B1Photomask with back-side anti-reflective layer and method of manufactureSCHOTT LITHOTEC AG·Filed 2002·Granted Sep 28, 2004·38 cites·20 claims
- 0248US6576572B2Method of heating a substrate using a variable surface hot plate for improved bake uniformitySCHOTT LITHOTEC AG·Filed 2001·Granted Jun 10, 2003·4 cites·8 claims
- 0342US6758669B2Variable surface hot plate for improved bake uniformity of substratesSCHOTT LITHOTEC AG·Filed 2002·Granted Jul 6, 2004·2 cites·16 claims
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