Assignee
SCHALLER MATTHIAS
DE·5 granted patents·1 pending application·2 citations·filing 2009–2011
Top patents by PatentIndex Score
6 records- 0162US8575041B2Repair of damaged surface areas of sensitive low-K dielectrics of microstructure devices after plasma processing by in situ treatmentSCHALLER MATTHIAS·Filed 2011·Granted Nov 5, 2013·1 cites·25 claims
- 0262US8440579B2Re-establishing surface characteristics of sensitive low-k dielectrics in microstructure device by using an in situ surface modificationSCHALLER MATTHIAS·Filed 2011·Granted May 14, 2013·1 cites·17 claims
- 0346US8423320B2Method and system for quantitative inline material characterization in semiconductor production processes based on structural measurements and related modelsSCHALLER MATTHIAS·Filed 2009·Granted Apr 16, 2013·0 cites·26 claims
- 0445US8110498B2Method for passivating exposed copper surfaces in a metallization layer of a semiconductor deviceSCHALLER MATTHIAS·Filed 2009·Granted Feb 7, 2012·0 cites·15 claims
- 0540US8888947B2Method and system for advanced process control in an etch system by gas flow control on the basis of CD measurementsSCHALLER MATTHIAS·Filed 2010·Granted Nov 18, 2014·0 cites·6 claims
- 0632US2010301494A1Re-establishing a hydrophobic surface of sensitive low-k dielectrics in microstructure devicesSCHALLER MATTHIAS·Filed 2010·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when SCHALLER MATTHIAS files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →