Assignee
SATOH SHU
US·3 granted patents·4 citations·filing 2009–2010
Top patents by PatentIndex Score
3 records- 0175US8071964B2System and method of performing uniform dose implantation under adverse conditionsSATOH SHU·Filed 2009·Granted Dec 6, 2011·4 cites·16 claims
- 0244US8080814B2Method for improving implant uniformity during photoresist outgassingSATOH SHU·Filed 2010·Granted Dec 20, 2011·0 cites·20 claims
- 0339US8227773B2Versatile beam glitch detection systemSATOH SHU·Filed 2010·Granted Jul 24, 2012·0 cites·19 claims
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