Assignee
SATO KOHEI
JP·3 granted patents·9 citations·filing 2008–2012
Top patents by PatentIndex Score
3 records- 0178US8920665B2Plasma processing apparatus and plasma processing methodSATO KOHEI·Filed 2012·Granted Dec 30, 2014·4 cites·5 claims
- 0272US8148268B2Plasma treatment apparatus and plasma treatment methodSATO KOHEI·Filed 2008·Granted Apr 3, 2012·3 cites·5 claims
- 0366US9384946B2Plasma processing apparatusSATO KOHEI·Filed 2012·Granted Jul 5, 2016·2 cites·5 claims
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