Assignee
SATAKE KEIGO
JP·3 granted patents·1 pending application·0 citations·filing 2006–2011
Top patents by PatentIndex Score
4 records- 0144US8104948B2Processing liquid mixing apparatus and method, substrate processing apparatus, and storage mediumSATAKE KEIGO·Filed 2009·Granted Jan 31, 2012·0 cites·13 claims
- 0242US8409359B2Substrate processing apparatus, substrate processing method and storage mediumSATAKE KEIGO·Filed 2008·Granted Apr 2, 2013·0 cites·9 claims
- 0338US2007181147A1Processing-fluid flow measuring methodSATAKE KEIGO·Filed 2006·Application pending·0 cites
- 0434US8622073B2Apparatus and method for controlling flow rate of liquid, and storage mediumSATAKE KEIGO·Filed 2011·Granted Jan 7, 2014·0 cites·17 claims
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