Individual holder
SANT SANKET P
US·1 granted patent·1 pending application·1 citations·filing 2011–2012
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
2 records- 0159US8119532B2Inductively coupled dual zone processing chamber with single planar antennaSANT SANKET P·Filed 2011·Granted Feb 21, 2012·1 cites·18 claims
- 0236US2014034242A1Edge ring assembly for plasma processing chamber and method of manufacture thereofSANT SANKET P·Filed 2012·Application pending·0 cites
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