Assignee
SAIDO SHUHEI
JP·2 granted patents·7 citations·filing 2010–2012
Top patents by PatentIndex Score
2 records- 0182US9082694B2Substrate processing apparatus, method for manufacturing substrate, and method for manufacturing semiconductor deviceSAIDO SHUHEI·Filed 2012·Granted Jul 14, 2015·7 cites·16 claims
- 0242US8771416B2Substrate processing apparatus with an insulator disposed in the reaction chamberSAIDO SHUHEI·Filed 2010·Granted Jul 8, 2014·0 cites·10 claims
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