Assignee
S C FLUIDS INC
US·6 granted patents·2 pending applications·410 citations·filing 2000–2005
Top patents by PatentIndex Score
8 records- 0194US6334266B1Supercritical fluid drying system and method of useS C FLUIDS INC·Filed 2000·Granted Jan 1, 2002·166 cites·18 claims
- 0291US6508259B1Inverted pressure vessel with horizontal through loadingS C FLUIDS INC·Filed 2000·Granted Jan 21, 2003·91 cites·13 claims
- 0390US6612317B2Supercritical fluid delivery and recovery system for semiconductor wafer processingS C FLUIDS INC·Filed 2001·Granted Sep 2, 2003·83 cites·20 claims
- 0483US6602349B2Supercritical fluid cleaning process for precision surfacesS C FLUIDS INC·Filed 2001·Granted Aug 5, 2003·39 cites·27 claims
- 0581US6497239B2Inverted pressure vessel with shielded closure mechanismS C FLUIDS INC·Filed 2001·Granted Dec 24, 2002·31 cites·17 claims
- 0648US2005183743A1Method and system for maintaining a solution of a sparingly soluble additive in a process fluidS C FLUIDS INC·Filed 2005·Application pending·0 cites
- 0737US6935352B2Adding energy to a cleaning process fluid for removing photo resist, residues and particles from semiconductor substrates, photo masks, reticles, disks and flat-panel displaysS C FLUIDS INC·Filed 2004·Granted Aug 30, 2005·0 cites·8 claims
- 0834US2006029310A1Loadbearing platform with fluid support, isolation and rotationS C FLUIDS INC·Filed 2005·Application pending·0 cites
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