Assignee
REDWOOD MICROSYSTEMS INC
US·10 granted patents·761 citations·filing 1991–2003
Top patents by PatentIndex Score
10 records- 0198US5270125ABoron nutride membrane in wafer structureREDWOOD MICROSYSTEMS INC·Filed 1991·Granted Dec 14, 1993·252 cites·10 claims
- 0296US6149123AIntegrated electrically operable micro-valveREDWOOD MICROSYSTEMS INC·Filed 1997·Granted Nov 21, 2000·106 cites·12 claims
- 0396US5865417AIntegrated electrically operable normally closed valveREDWOOD MICROSYSTEMS INC·Filed 1996·Granted Feb 2, 1999·125 cites·13 claims
- 0492US6237394B1Apparatus and method for correcting drift in a sensorREDWOOD MICROSYSTEMS INC·Filed 1999·Granted May 29, 2001·103 cites·6 claims
- 0586US6325886B1Method for attaching a micromechanical device to a manifold, and fluid control system produced therebyREDWOOD MICROSYSTEMS INC·Filed 2000·Granted Dec 4, 2001·44 cites·18 claims
- 0685US6160243AApparatus and method for controlling fluid in a micromachined boilerREDWOOD MICROSYSTEMS INC·Filed 1998·Granted Dec 12, 2000·51 cites·12 claims
- 0780US6123107AApparatus and method for mounting micromechanical fluid control componentsREDWOOD MICROSYSTEMS INC·Filed 1999·Granted Sep 26, 2000·42 cites·20 claims
- 0876US7047814B2Micro-electromechanical sensorREDWOOD MICROSYSTEMS INC·Filed 2002·Granted May 23, 2006·20 cites·43 claims
- 0974US6907904B2Fluid delivery system and mounting panel thereforREDWOOD MICROSYSTEMS INC·Filed 2003·Granted Jun 21, 2005·12 cites·5 claims
- 1059US6869818B2Method for producing and testing a corrosion-resistant channel in a silicon deviceREDWOOD MICROSYSTEMS INC·Filed 2002·Granted Mar 22, 2005·6 cites·13 claims
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