Assignee
RASHEED MUHAMMAD
US·4 granted patents·1 pending application·14 citations·filing 2011–2012
Top patents by PatentIndex Score
5 records- 0190US8911601B2Deposition ring and electrostatic chuck for physical vapor deposition chamberRASHEED MUHAMMAD·Filed 2011·Granted Dec 16, 2014·8 cites·10 claims
- 0278US9834840B2Process kit shield for improved particle reductionRASHEED MUHAMMAD·Filed 2011·Granted Dec 5, 2017·1 cites·12 claims
- 0375US8647485B2Process kit shield for plasma enhanced processing chamberRASHEED MUHAMMAD·Filed 2012·Granted Feb 11, 2014·4 cites·7 claims
- 0464US8795488B2Apparatus for physical vapor deposition having centrally fed RF energyRASHEED MUHAMMAD·Filed 2011·Granted Aug 5, 2014·1 cites·20 claims
- 0554US2013112554A1Deposition ring and electrostatic chuck for physical vapor deposition chamberRASHEED MUHAMMAD·Filed 2012·Application pending·0 cites
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →