Assignee
QIN SHU
US·7 granted patents·10 citations·filing 2005–2012
Top patents by PatentIndex Score
7 records- 0182US8642135B2Systems and methods for plasma doping microfeature workpiecesQIN SHU·Filed 2005·Granted Feb 4, 2014·7 cites·23 claims
- 0274US8324088B2Sputtering-less ultra-low energy ion implantationQIN SHU·Filed 2011·Granted Dec 4, 2012·2 cites·23 claims
- 0362US8671879B2Systems and methods for plasma processing of microfeature workpiecesQIN SHU·Filed 2009·Granted Mar 18, 2014·0 cites·23 claims
- 0460US8524572B2Methods of processing units comprising crystalline materials, and methods of forming semiconductor-on-insulator constructionsQIN SHU·Filed 2011·Granted Sep 3, 2013·1 cites·5 claims
- 0557US8426763B2Rapid thermal processing systems and methods for treating microelectronic substratesQIN SHU·Filed 2009·Granted Apr 23, 2013·0 cites·18 claims
- 0655US8709927B2Methods of implanting dopant ionsQIN SHU·Filed 2012·Granted Apr 29, 2014·0 cites·20 claims
- 0744US8293659B2Method for fabricating dielectric layer with improved insulating propertiesQIN SHU·Filed 2011·Granted Oct 23, 2012·0 cites·17 claims
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