Assignee
PSILOQUEST
US·2 granted patents·5 pending applications·40 citations·filing 2001–2006
Top patents by PatentIndex Score
7 records- 0182US6596388B1Method of introducing organic and inorganic grafted compounds throughout a thermoplastic polishing pad using a supercritical fluid and applications thereforPSILOQUEST·Filed 2001·Granted Jul 22, 2003·20 cites·16 claims
- 0274US6764574B1Polishing pad composition and method of usePSILOQUEST·Filed 2001·Granted Jul 20, 2004·20 cites·14 claims
- 0346US2007015444A1Smoothing pad for bare semiconductor wafersPSILOQUEST·Filed 2006·Application pending·0 cites
- 0444US2005266226A1Chemical mechanical polishing pad and method for selective metal and barrier polishingPSILOQUEST·Filed 2004·Application pending·0 cites
- 0543US2005055885A1Polishing pad for chemical mechanical polishingPSILOQUEST·Filed 2004·Application pending·0 cites
- 0641US2006154579A1Thermoplastic chemical mechanical polishing pad and method of manufacturePSILOQUEST·Filed 2005·Application pending·0 cites
- 0738US2005153631A1System and method for monitoring quality control of chemical mechanical polishing padsPSILOQUEST·Filed 2004·Application pending·0 cites
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