Assignee
PLEX LLC
US·13 granted patents·2 pending applications·156 citations·filing 1998–2016
Top patents by PatentIndex Score
15 records- 0186US6421421B1Extreme ultraviolet based on colliding neutral beamsPLEX LLC·Filed 2001·Granted Jul 16, 2002·40 cites·37 claims
- 0283US6567499B2Star pinch X-ray and extreme ultraviolet photon sourcePLEX LLC·Filed 2001·Granted May 20, 2003·33 cites·61 claims
- 0381US8592788B1Lithium extreme ultraviolet source and operating methodPLEX LLC·Filed 2013·Granted Nov 26, 2013·5 cites·14 claims
- 0480US6728337B2Star pinch plasma source of photons or neutronsPLEX LLC·Filed 2002·Granted Apr 27, 2004·26 cites·31 claims
- 0576US9155178B1Extreme ultraviolet source with magnetic cusp plasma controlPLEX LLC·Filed 2014·Granted Oct 6, 2015·3 cites·7 claims
- 0674US7479646B2Extreme ultraviolet source with wide angle vapor containment and refluxPLEX LLC·Filed 2006·Granted Jan 20, 2009·10 cites·10 claims
- 0766US7637403B2Liquid metal droplet generatorPLEX LLC·Filed 2005·Granted Dec 29, 2009·3 cites·11 claims
- 0864US7075096B2Injection pinch discharge extreme ultraviolet sourcePLEX LLC·Filed 2004·Granted Jul 11, 2006·9 cites·27 claims
- 0959US7079306B2Optically addressed extreme ultraviolet modulator and lithography system incorporating modulatorPLEX LLC·Filed 2004·Granted Jul 18, 2006·5 cites·36 claims
- 1058US6075838AZ-pinch soft x-ray source using diluent gasPLEX LLC·Filed 1998·Granted Jun 13, 2000·22 cites·21 claims
- 1152US9301380B2Extreme ultraviolet source with magnetic cusp plasma controlPLEX LLC·Filed 2015·Granted Mar 29, 2016·0 cites·10 claims
- 1244US9544986B2Extreme ultraviolet source with magnetic cusp plasma controlPLEX LLC·Filed 2016·Granted Jan 10, 2017·0 cites·8 claims
- 1343US9578729B2Extreme ultraviolet source with dual magnetic cusp particle catchersPLEX LLC·Filed 2015·Granted Feb 21, 2017·0 cites·4 claims
- 1438US2011089834A1Z-pinch plasma generator and plasma targetPLEX LLC·Filed 2010·Application pending·0 cites
- 1537US2009224182A1Laser Heated Discharge Plasma EUV Source With Plasma Assisted Lithium RefluxPLEX LLC·Filed 2009·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →