Assignee
PLASMA THERM LLC
US·34 granted patents·5 pending applications·54 citations·filing 2013–2023
Top patents by PatentIndex Score
39 records- 0195US8785332B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2013·Granted Jul 22, 2014·15 cites·2 claims
- 0291US9711406B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA-THERM LLC·Filed 2016·Granted Jul 18, 2017·6 cites·7 claims
- 0391US8691702B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2013·Granted Apr 8, 2014·13 cites·6 claims
- 0487US11587834B1Protective coating for plasma dicingPLASMA THERM LLC·Filed 2021·Granted Feb 21, 2023·1 cites·16 claims
- 0584US10818552B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2019·Granted Oct 27, 2020·3 cites·26 claims
- 0683US9070760B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2013·Granted Jun 30, 2015·3 cites·21 claims
- 0782US11747494B2Ion filter using aperture plate with plurality of zonesPLASMA THERM LLC·Filed 2020·Granted Sep 5, 2023·1 cites·17 claims
- 0880US8796154B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2013·Granted Aug 5, 2014·2 cites·11 claims
- 0977US9911654B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2016·Granted Mar 6, 2018·1 cites·8 claims
- 1076US9564366B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA-THERM LLC·Filed 2015·Granted Feb 7, 2017·1 cites·3 claims
- 1175US11908741B1Protective coating for plasma dicingPLASMA THERM LLC·Filed 2023·Granted Feb 20, 2024·0 cites·16 claims
- 1275US9082839B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2014·Granted Jul 14, 2015·3 cites·14 claims
- 1373US8980764B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2013·Granted Mar 17, 2015·1 cites·5 claims
- 1472US9105705B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2013·Granted Aug 11, 2015·1 cites·26 claims
- 1571US10269641B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2017·Granted Apr 23, 2019·1 cites·26 claims
- 1669US9343365B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2013·Granted May 17, 2016·2 cites·9 claims
- 1768US11488865B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2019·Granted Nov 1, 2022·0 cites·8 claims
- 1867US10707060B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2018·Granted Jul 7, 2020·0 cites·12 claims
- 1966US11651999B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2020·Granted May 16, 2023·0 cites·23 claims
- 2065US10741447B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA-THERM LLC·Filed 2018·Granted Aug 11, 2020·0 cites·14 claims
- 2162US12489018B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2022·Granted Dec 2, 2025·0 cites·8 claims
- 2261US10297427B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2015·Granted May 21, 2019·0 cites·6 claims
- 2361US9202721B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2014·Granted Dec 1, 2015·0 cites·7 claims
- 2460US9202720B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2013·Granted Dec 1, 2015·0 cites·5 claims
- 2559US9496177B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA-THERM LLC·Filed 2015·Granted Nov 15, 2016·0 cites·6 claims
- 2658US10573557B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2015·Granted Feb 25, 2020·0 cites·7 claims
- 2758US2023343647A1Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2023·Application pending·0 cites
- 2853US8946058B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2013·Granted Feb 3, 2015·0 cites·42 claims
- 2953US2023253252A1Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2023·Application pending·0 cites
- 3052US2014150246A1Apparatus and Method for Carrying SubstratesPLASMA THERM LLC·Filed 2014·Application pending·0 cites
- 3151US2018143332A1Ion FilterPLASMA THERM LLC·Filed 2017·Application pending·0 cites
- 3249US9368404B2Method for dicing a substrate with back metalPLASMA THERM LLC·Filed 2013·Granted Jun 14, 2016·0 cites·15 claims
- 3348US11075057B2Device for treating an object with plasmaPLASMA THERM LLC·Filed 2018·Granted Jul 27, 2021·0 cites·3 claims
- 3448US10497621B2Method for dicing a substrate with back metalPLASMA THERM LLC·Filed 2016·Granted Dec 3, 2019·0 cites·13 claims
- 3548US9202737B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2015·Granted Dec 1, 2015·0 cites·7 claims
- 3645US2021391150A1Plasma Source ConfigurationPLASMA THERM LLC·Filed 2020·Application pending·0 cites
- 3742US10943825B2Method for dicing die attach filmPLASMA THERM LLC·Filed 2019·Granted Mar 9, 2021·0 cites·5 claims
- 3841US9865436B1Powered anode for ion source for DLC and reactive processesPLASMA-THERM LLC·Filed 2016·Granted Jan 9, 2018·0 cites·21 claims
- 3941USRE46339EMethod and apparatus for plasma dicing a semi-conductor waferPLASMA-THERM LLC·Filed 2015·Granted Mar 14, 2017·0 cites·42 claims
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