Assignee
PLANAR SEMICONDUCTOR INC
US·4 granted patents·2 citations·filing 2018–2018
Top patents by PatentIndex Score
4 records- 0171US10892172B2Removal of process effluentsPLANAR SEMICONDUCTOR INC·Filed 2018·Granted Jan 12, 2021·2 cites·37 claims
- 0250US10828677B2Cleaning flat objects with a pulsed-liquid jetPLANAR SEMICONDUCTOR INC·Filed 2018·Granted Nov 10, 2020·0 cites·27 claims
- 0349US11069521B2Subnanometer-level light-based substrate cleaning mechanismPLANAR SEMICONDUCTOR INC·Filed 2018·Granted Jul 20, 2021·0 cites·18 claims
- 0437US10985039B2Sub-nanometer-level substrate cleaning mechanismPLANAR SEMICONDUCTOR INC·Filed 2018·Granted Apr 20, 2021·0 cites·30 claims
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