Assignee
PIOTECH CO LTD
CN·3 granted patents·4 pending applications·1 citations·filing 2016–2023
Top patents by PatentIndex Score
7 records- 0163US2023274957A1Multi-station processing chamber for semiconductorPIOTECH CO LTD·Filed 2023·Application pending·0 cites
- 0260US10497591B2Load lock chamber and the cluster tool system using the samePIOTECH CO LTD·Filed 2016·Granted Dec 3, 2019·1 cites·9 claims
- 0350US2020203197A1Multi-station processing chamber for semiconductorPIOTECH CO LTD·Filed 2019·Application pending·0 cites
- 0443US10410909B2Waffer pedestal and support structure thereofPIOTECH CO LTD·Filed 2018·Granted Sep 10, 2019·0 cites·9 claims
- 0541US2019341280A1Waffer pedestal with heating mechanism and reaction chamber including the samePIOTECH CO LTD·Filed 2019·Application pending·0 cites
- 0639US2019057842A1Rf signal transmitting device used in plasma processing apparatusPIOTECH CO LTD·Filed 2018·Application pending·0 cites
- 0730US10643882B2Ceramic ring with a ladder structurePIOTECH CO LTD·Filed 2017·Granted May 5, 2020·0 cites·2 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →