Assignee
PICOSUN OY
FI·48 granted patents·25 pending applications·467 citations·filing 2012–2024
Top patents by PatentIndex Score
73 records- 0198US11004707B1Substrate processing apparatus and methodPICOSUN OY·Filed 2020·Granted May 11, 2021·9 cites·29 claims
- 0298US9868131B2Atomic layer deposition with plasma sourcePICOSUN OY·Filed 2015·Granted Jan 16, 2018·414 cites·11 claims
- 0394US10982325B2Fluid distributing device for a thin-film deposition apparatus, related apparatus and methodsPICOSUN OY·Filed 2020·Granted Apr 20, 2021·5 cites·31 claims
- 0492US8753716B2Method of depositing material using a deposition reactorPICOSUN OY·Filed 2013·Granted Jun 17, 2014·4 cites·7 claims
- 0591US12112927B2Substrate processing apparatus and methodPICOSUN OY·Filed 2022·Granted Oct 8, 2024·1 cites·10 claims
- 0689US9745661B2Method and apparatus for forming a substrate web track in an atomic layer deposition reactorPICOSUN OY·Filed 2013·Granted Aug 29, 2017·4 cites·11 claims
- 0787US12146218B2Precursor containerPICOSUN OY·Filed 2023·Granted Nov 19, 2024·0 cites·6 claims
- 0887US9869020B2Protecting a target pump interior with an ALD coatingPICOSUN OY·Filed 2013·Granted Jan 16, 2018·9 cites·16 claims
- 0985US12300523B2Substrate processing apparatus and methodPICOSUN OY·Filed 2020·Granted May 13, 2025·1 cites·13 claims
- 1085US11447867B2Coating of 3-dimensional substratesPICOSUN OY·Filed 2020·Granted Sep 20, 2022·2 cites·13 claims
- 1184US11761082B2ALD apparatus, method and valvePICOSUN OY·Filed 2017·Granted Sep 19, 2023·3 cites·30 claims
- 1284US9115426B2Coated article of martensitic steel and a method of forming a coated article of steelPICOSUN OY·Filed 2012·Granted Aug 25, 2015·4 cites·18 claims
- 1382US11873558B2Precursor containerPICOSUN OY·Filed 2022·Granted Jan 16, 2024·0 cites·10 claims
- 1481US9115755B2Current insulated bearing components and bearingsPICOSUN OY·Filed 2012·Granted Aug 25, 2015·3 cites·13 claims
- 1579US9840775B2Method and apparatus for processing particulate materialPICOSUN OY·Filed 2013·Granted Dec 12, 2017·1 cites·5 claims
- 1678US12460297B2ALD apparatus, method and valvePICOSUN OY·Filed 2023·Granted Nov 4, 2025·0 cites·30 claims
- 1778US10597778B2ALD method and apparatus including a photon sourcePICOSUN OY·Filed 2015·Granted Mar 24, 2020·1 cites·16 claims
- 1877US10329662B2Protecting an interior of a hollow body with an ALD coatingPICOSUN OY·Filed 2014·Granted Jun 25, 2019·2 cites·15 claims
- 1975US12110588B2Adjustable fluid inlet assembly for a substrate processing apparatus and methodPICOSUN OY·Filed 2022·Granted Oct 8, 2024·0 cites·15 claims
- 2075US11280001B2Substrate loading in an ALD reactorPICOSUN OY·Filed 2018·Granted Mar 22, 2022·1 cites·18 claims
- 2174US10619241B2ALD method and apparatusPICOSUN OY·Filed 2015·Granted Apr 14, 2020·1 cites·16 claims
- 2273US12454754B2Atomic layer deposition reactor comprising a top-loading reaction chamber configured to carry a batch of vertically oriented substratesPICOSUN OY·Filed 2018·Granted Oct 28, 2025·0 cites·16 claims
- 2373US12351915B2Porous inletPICOSUN OY·Filed 2019·Granted Jul 8, 2025·1 cites·23 claims
- 2472US11970774B2Method of operating a deposition or cleaning apparatusPICOSUN OY·Filed 2023·Granted Apr 30, 2024·0 cites·8 claims
- 2572US11668005B2Manufacturing of coated itemsPICOSUN OY·Filed 2020·Granted Jun 6, 2023·0 cites·14 claims
- 2671US2025197994A1Photoprotective coating films and methods for manufacturing thereofPICOSUN OY·Filed 2024·Application pending·0 cites
- 2766US12297535B2Substrate processing methods and apparatusPICOSUN OY·Filed 2019·Granted May 13, 2025·0 cites·19 claims
- 2866US10161038B2Substrate loading in an ALD reactorPICOSUN OY·Filed 2012·Granted Dec 25, 2018·1 cites·18 claims
- 2966US2021310124A1Coating by ald for suppressing metallic whiskersPICOSUN OY·Filed 2021·Application pending·0 cites
- 3066US2023257870A1Coated items and manufacturing thereofPICOSUN OY·Filed 2023·Application pending·0 cites
- 3166US2024162019A1Substrate processing apparatus and methodPICOSUN OY·Filed 2022·Application pending·0 cites
- 3265US11668004B2Substrate coatingPICOSUN OY·Filed 2020·Granted Jun 6, 2023·0 cites·19 claims
- 3364US11976989B2Sensor and its manufacturing methodPICOSUN OY·Filed 2020·Granted May 7, 2024·0 cites·11 claims
- 3464US2025198004A1Method, insert and apparatus for process control and monitoring of thin film depositionPICOSUN OY·Filed 2023·Application pending·0 cites
- 3563US2025075318A1Method and apparatus for cleaning a reaction chamberPICOSUN OY·Filed 2024·Application pending·0 cites
- 3660US12247288B2Substrate processing apparatus and methodPICOSUN OY·Filed 2022·Granted Mar 11, 2025·0 cites·13 claims
- 3760US2024360555A1Precursor container apparatusPICOSUN OY·Filed 2022·Application pending·0 cites
- 3858US12383923B2Atomic layer deposition with plasma sourcePICOSUN OY·Filed 2017·Granted Aug 12, 2025·0 cites·14 claims
- 3958US11477894B2Method for formation of patterned solder maskPICOSUN OY·Filed 2020·Granted Oct 18, 2022·0 cites·16 claims
- 4057US11730558B2Color codingPICOSUN OY·Filed 2020·Granted Aug 22, 2023·0 cites·9 claims
- 4157US2020181774A1Apparatus with a valve and method of operationPICOSUN OY·Filed 2018·Application pending·0 cites
- 4256US11261526B2Particle coatingPICOSUN OY·Filed 2016·Granted Mar 1, 2022·0 cites·18 claims
- 4355US12325915B2Substrate processing apparatus and methodPICOSUN OY·Filed 2020·Granted Jun 10, 2025·0 cites·12 claims
- 4455US11414758B2Sample protectionPICOSUN OY·Filed 2020·Granted Aug 16, 2022·0 cites·10 claims
- 4555US2024261467A1Nanolaminate coating, related coated items and uses, method for improving resistance of a substrate to corrosion in essentially saline environments, medical devicePICOSUN OY·Filed 2022·Application pending·0 cites
- 4654US11759100B2Method and apparatus for cleaning medical instruments and for detecting residue thereonPICOSUN OY·Filed 2020·Granted Sep 19, 2023·0 cites·11 claims
- 4754US11505864B2Adjustable fluid inlet assembly for a substrate processing apparatus and methodPICOSUN OY·Filed 2017·Granted Nov 22, 2022·0 cites·15 claims
- 4854US11241316B2Implant coatingPICOSUN OY·Filed 2020·Granted Feb 8, 2022·0 cites·10 claims
- 4954US2024240310A1Plasma resistant coating, related production method and usesPICOSUN OY·Filed 2022·Application pending·0 cites
- 5054US2023024132A1Substrate processing apparatus and methodPICOSUN OY·Filed 2020·Application pending·0 cites
Showing the top 50 of 73 patent records by PatentIndex Score.
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