Assignee
PHAM XUYEN
0 granted patents·3 pending applications·0 citations·filing 2006–2006
Technology mixH10P3
Top patents by PatentIndex Score
3 records- 0151US2007084079A1Multi-zone shower head for drying single semiconductor substratePHAM XUYEN·Filed 2006·Application pending·0 cites
- 0243US2007256632A1Systems and methods for clamping semiconductor wafersPHAM XUYEN·Filed 2006·Application pending·0 cites
- 0343US2007246079A1Multi zone shower head for cleaning and drying wafer and method of cleaning and drying waferPHAM XUYEN·Filed 2006·Application pending·0 cites
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