Assignee
PFEIFFER VACUUM
FR·29 granted patents·13 pending applications·21 citations·filing 2014–2023
Top patents by PatentIndex Score
42 records- 0189US12066355B2Sniffer probe and leak detectorPFEIFFER VACUUM·Filed 2020·Granted Aug 20, 2024·2 cites·18 claims
- 0282US11953484B2Method for setting an airborne molecular contamination measurement station, and measurement stationPFEIFFER VACUUM·Filed 2020·Granted Apr 9, 2024·2 cites·10 claims
- 0381US11313752B2Leak detection module and method of checking the seal of an object to be tested using a tracer gasPFEIFFER VACUUM·Filed 2019·Granted Apr 26, 2022·4 cites·10 claims
- 0481US11181435B2Sniffer probe, leak detector and leak detection methodPFEIFFER VACUUM·Filed 2018·Granted Nov 23, 2021·3 cites·13 claims
- 0579US10431484B2Method and station for measuring the contamination of a transport box for the atmospheric conveyance and storage of substratesPFEIFFER VACUUM·Filed 2016·Granted Oct 1, 2019·4 cites·14 claims
- 0678US11768134B2Station and method for measuring airborne molecular contaminationPFEIFFER VACUUM·Filed 2019·Granted Sep 26, 2023·2 cites·5 claims
- 0774US10794793B2Device for the detection of leaks and module for the detection of leaksPFEIFFER VACUUM·Filed 2016·Granted Oct 6, 2020·2 cites·36 claims
- 0872US11428598B2Leak detector for checking sealing tightness of an object comprising a pumping device including a turbomolecular pump and first and second vacuum pumps having at least one first and second pumping stage wherein the outlet of the second vacuum pump is connected between pumping stages of the first vacuum pumpPFEIFFER VACUUM·Filed 2018·Granted Aug 30, 2022·1 cites·10 claims
- 0966US10634577B2Leak detection module and method for checking the seal-tightness of an object to be tested by tracer gasPFEIFFER VACUUM·Filed 2018·Granted Apr 28, 2020·1 cites·17 claims
- 1061US11519811B2Leak detector and leak detection method for leak-testing objectsPFEIFFER VACUUM·Filed 2018·Granted Dec 6, 2022·0 cites·15 claims
- 1160US12584487B2Turbomolecular vacuum pump and methods for manufacturing a rotorPFEIFFER VACUUM·Filed 2023·Granted Mar 24, 2026·0 cites·13 claims
- 1259US11396875B2Dry vacuum pump and method for controlling a synchronous motor of a vacuum pumpPFEIFFER VACUUM·Filed 2018·Granted Jul 26, 2022·0 cites·14 claims
- 1359US2026086075A1Method and station for measuring airborne molecular contaminationPFEIFFER VACUUM·Filed 2023·Application pending·0 cites
- 1459US2026043717A1Station for measuring airborne molecular contaminationPFEIFFER VACUUM·Filed 2023·Application pending·0 cites
- 1558US11493042B2Pumping unit including a rough vacuum pump and a roots vacuum pumpPFEIFFER VACUUM·Filed 2019·Granted Nov 8, 2022·0 cites·20 claims
- 1657US12216031B2Station and method for measuring airborne molecular contaminationPFEIFFER VACUUM·Filed 2021·Granted Feb 4, 2025·0 cites·15 claims
- 1754US2026040876A1Station and method for measuring the practicle contamination of a transport enclosure for the atmospheric transport and storage of semiconductor wafersPFEIFFER VACUUM·Filed 2023·Application pending·0 cites
- 1853US12496563B2Vacuum line and method for controlling a vacuum line to reduce explosion potential via injection of diluent gas to lower flammable gas concentrationPFEIFFER VACUUM·Filed 2021·Granted Dec 16, 2025·0 cites·19 claims
- 1953US11499556B2Dry vacuum pump with a pressure variation reducing expansion device between a pumping side volume and an oil sumpPFEIFFER VACUUM·Filed 2019·Granted Nov 15, 2022·0 cites·11 claims
- 2052US12110907B2Heating device and vacuum pumpPFEIFFER VACUUM·Filed 2022·Granted Oct 8, 2024·0 cites·19 claims
- 2152US11815096B2Pump unitPFEIFFER VACUUM·Filed 2020·Granted Nov 14, 2023·0 cites·14 claims
- 2250US2023249118A1Gas treatment device and vacuum linePFEIFFER VACUUM·Filed 2021·Application pending·0 cites
- 2349US11493045B2Dry vacuum pump with at least one sealing device with a deflectorPFEIFFER VACUUM·Filed 2019·Granted Nov 8, 2022·0 cites·10 claims
- 2448US12410805B2Turbomolecular vacuum pump and associated methodPFEIFFER VACUUM·Filed 2022·Granted Sep 9, 2025·0 cites·17 claims
- 2544US10775259B2Spray device and leak detection modulePFEIFFER VACUUM·Filed 2017·Granted Sep 15, 2020·0 cites·12 claims
- 2643US11078910B2Pumping unit and usePFEIFFER VACUUM·Filed 2018·Granted Aug 3, 2021·0 cites·14 claims
- 2742US10478872B2Method and station for treatment of a transport container made of plastic material for the atmospheric storage and conveyance of substratesPFEIFFER VACUUM·Filed 2015·Granted Nov 19, 2019·0 cites·11 claims
- 2841US11585342B2Primary vacuum pump of dry type and method for controlling the injection of a purge gasPFEIFFER VACUUM·Filed 2019·Granted Feb 21, 2023·0 cites·10 claims
- 2941US10578512B2Leak detector and method for detecting leaksPFEIFFER VACUUM·Filed 2016·Granted Mar 3, 2020·0 cites·11 claims
- 3041US10544809B2Dry roughing vacuum pumpPFEIFFER VACUUM·Filed 2014·Granted Jan 28, 2020·0 cites·16 claims
- 3140US2022379250A1Trap for vacuum line, installation and usePFEIFFER VACUUM·Filed 2020·Application pending·0 cites
- 3238US11725659B2Dry-type primary vacuum pump and method for controlling the injection of a purging gasPFEIFFER VACUUM·Filed 2020·Granted Aug 15, 2023·0 cites·12 claims
- 3337US2022325718A1Turbomolecular vacuum pumpPFEIFFER VACUUM·Filed 2020·Application pending·0 cites
- 3436US11430681B2Device and method for controlling the tightness of a transport enclosure for the conveyance and atmospheric storage of semiconductor substratesPFEIFFER VACUUM·Filed 2017·Granted Aug 30, 2022·0 cites·18 claims
- 3535US10578513B2Method for controlling the leaktightness of sealed products and installation for the detection of leaksPFEIFFER VACUUM·Filed 2016·Granted Mar 3, 2020·0 cites·15 claims
- 3635US2021404476A1Method for controlling the temperature of a vacuum pump, and associated vacuum pump and installationPFEIFFER VACUUM·Filed 2019·Application pending·0 cites
- 3735US2023400030A1Turbomolecular vacuum pump and method for manufacturing a rotorPFEIFFER VACUUM·Filed 2021·Application pending·0 cites
- 3834US2023033204A1Dry vacuum pumpPFEIFFER VACUUM·Filed 2021·Application pending·0 cites
- 3934US2020173441A1Method for monitoring an operating state of a pumping devicePFEIFFER VACUUM·Filed 2018·Application pending·0 cites
- 4027US2022120279A1Rough-vacuum pump of dry typePFEIFFER VACUUM·Filed 2020·Application pending·0 cites
- 4125US2019277286A1Stator, rotary shaft, dry vacuum pump and associated manufacturing processesPFEIFFER VACUUM·Filed 2017·Application pending·0 cites
- 4223US2023323878A1Dry vacuum pump and manufacturing methodPFEIFFER VACUUM·Filed 2020·Application pending·0 cites
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