Assignee
PATERSON ALEXANDER
0 granted patents·3 pending applications·0 citations·filing 2007–2007
Technology mixH01J3
Top patents by PatentIndex Score
3 records- 0153US2008023443A1Alternating asymmetrical plasma generation in a process chamberPATERSON ALEXANDER·Filed 2007·Application pending·0 cites
- 0249US2008230008A1Plasma species and uniformity control through pulsed vhf operationPATERSON ALEXANDER·Filed 2007·Application pending·0 cites
- 0349US2008236490A1Plasma reactor with an overhead inductive antenna and an overhead gas distribution showerheadPATERSON ALEXANDER·Filed 2007·Application pending·0 cites
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