Individual holder
PARKS RICHARD W
US·3 granted patents·15 citations·filing 2011–2012
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
3 records- 0177US8828776B2Diffusion furnaces employing ultra low mass transport systems and methods of wafer rapid diffusion processingPARKS RICHARD W·Filed 2012·Granted Sep 9, 2014·5 cites·20 claims
- 0276US8816253B2Dual independent transport systems for IR conveyor furnaces and methods of firing thin work piecesPARKS RICHARD W·Filed 2012·Granted Aug 26, 2014·5 cites·20 claims
- 0374US8236596B2Diffusion furnaces employing ultra low mass transport systems and methods of wafer rapid diffusion processingPARKS RICHARD W·Filed 2011·Granted Aug 7, 2012·5 cites·16 claims
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