Assignee
PARK MIN-JOON
KR·2 granted patents·16 citations·filing 2010–2011
Top patents by PatentIndex Score
2 records- 0182US8555810B2Plasma dry etching apparatus having coupling ring with cooling and heating unitsPARK MIN-JOON·Filed 2010·Granted Oct 15, 2013·15 cites·19 claims
- 0256US9054054B2Methods of forming patterns and methods of manufacturing semiconductor devices using the samePARK MIN-JOON·Filed 2011·Granted Jun 9, 2015·1 cites·20 claims
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