Assignee
PADMANABAN MUNIRATHNA
US·2 granted patents·5 pending applications·9 citations·filing 2004–2010
Top patents by PatentIndex Score
7 records- 0184US8632948B2Positive-working photoimageable bottom antireflective coatingPADMANABAN MUNIRATHNA·Filed 2009·Granted Jan 21, 2014·9 cites·9 claims
- 0251US2008035556A1Process for producing film forming resins for photoresist compositionsPADMANABAN MUNIRATHNA·Filed 2007·Application pending·0 cites
- 0343US2008171270A1Polymers Useful in Photoresist Compositions and Compositions ThereofPADMANABAN MUNIRATHNA·Filed 2007·Application pending·0 cites
- 0442US2009042148A1Photoresist Composition for Deep UV and Process ThereofPADMANABAN MUNIRATHNA·Filed 2007·Application pending·0 cites
- 0541US2008187868A1Photoactive CompoundsPADMANABAN MUNIRATHNA·Filed 2007·Application pending·0 cites
- 0640US2006102554A1Process for producing film forming resins for photoresist compositionsPADMANABAN MUNIRATHNA·Filed 2004·Application pending·0 cites
- 0734US8796398B2Superfine pattern mask, method for production thereof, and method employing the same for forming superfine patternPADMANABAN MUNIRATHNA·Filed 2010·Granted Aug 5, 2014·0 cites·8 claims
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