Assignee
ONTRAK SYSTEMS INC
US·35 granted patents·2,288 citations·filing 1992–1999
Top patents by PatentIndex Score
35 records- 0198US5692947ALinear polisher and method for semiconductor wafer planarizationONTRAK SYSTEMS INC·Filed 1996·Granted Dec 2, 1997·249 cites·10 claims
- 0298US5558568AWafer polishing machine with fluid bearingsONTRAK SYSTEMS INC·Filed 1994·Granted Sep 24, 1996·204 cites·17 claims
- 0397US5593344AWafer polishing machine with fluid bearings and drive systemsONTRAK SYSTEMS INC·Filed 1994·Granted Jan 14, 1997·154 cites·25 claims
- 0496US5575707APolishing pad cluster for polishing a semiconductor waferONTRAK SYSTEMS INC·Filed 1994·Granted Nov 19, 1996·134 cites·15 claims
- 0595US5803799AWafer polishing headONTRAK SYSTEMS INC·Filed 1997·Granted Sep 8, 1998·154 cites·13 claims
- 0693US5800248AControl of chemical-mechanical polishing rate across a substrate surfaceONTRAK SYSTEMS INC·Filed 1996·Granted Sep 1, 1998·133 cites·23 claims
- 0790US5806126AApparatus for a brush assemblyONTRAK SYSTEMS INC·Filed 1997·Granted Sep 15, 1998·97 cites·7 claims
- 0888US5861066AMethod and apparatus for cleaning edges of contaminated substratesONTRAK SYSTEMS INC·Filed 1996·Granted Jan 19, 1999·88 cites·18 claims
- 0987US5475889AAutomatically adjustable brush assembly for cleaning semiconductor wafersONTRAK SYSTEMS INC·Filed 1994·Granted Dec 19, 1995·108 cites·21 claims
- 1083US5913714AMethod for dressing a polishing pad during polishing of a semiconductor waferONTRAK SYSTEMS INC·Filed 1998·Granted Jun 22, 1999·47 cites·1 claims
- 1183US5857899AWafer polishing head with pad dressing elementONTRAK SYSTEMS INC·Filed 1997·Granted Jan 12, 1999·49 cites·13 claims
- 1283US5851041AWafer holder with spindle assembly and wafer holder actuatorONTRAK SYSTEMS INC·Filed 1996·Granted Dec 22, 1998·95 cites·34 claims
- 1381US5566466ASpindle assembly with improved wafer holderONTRAK SYSTEMS INC·Filed 1994·Granted Oct 22, 1996·77 cites·22 claims
- 1478US5745946ASubstrate processing systemONTRAK SYSTEMS INC·Filed 1996·Granted May 5, 1998·68 cites·17 claims
- 1576US5868863AMethod and apparatus for cleaning of semiconductor substrates using hydrofluoric acid (HF)ONTRAK SYSTEMS INC·Filed 1997·Granted Feb 9, 1999·34 cites·13 claims
- 1675US5762084AMegasonic bathONTRAK SYSTEMS INC·Filed 1996·Granted Jun 9, 1998·46 cites·25 claims
- 1774US5858109AMethod and apparatus for cleaning of semiconductor substrates using standard clean 1 (SC1)ONTRAK SYSTEMS INC·Filed 1997·Granted Jan 12, 1999·38 cites·11 claims
- 1873US5727332AContamination control in substrate processing systemONTRAK SYSTEMS INC·Filed 1997·Granted Mar 17, 1998·44 cites·17 claims
- 1972US5571044AWafer holder for semiconductor wafer polishing machineONTRAK SYSTEMS INC·Filed 1994·Granted Nov 5, 1996·27 cites·19 claims
- 2070US5693148AProcess for brush cleaningONTRAK SYSTEMS INC·Filed 1995·Granted Dec 2, 1997·38 cites·52 claims
- 2170US5555177AMethod and apparatus for resetting individual processes in a control systemONTRAK SYSTEMS INC·Filed 1994·Granted Sep 10, 1996·32 cites·16 claims
- 2270US5442828ADouble-sided wafer scrubber with a wet submersing silicon wafer indexerONTRAK SYSTEMS INC·Filed 1992·Granted Aug 22, 1995·51 cites·8 claims
- 2368US5975736AScrubber control systemONTRAK SYSTEMS INC·Filed 1996·Granted Nov 2, 1999·37 cites·19 claims
- 2468US5794299AContainment apparatusONTRAK SYSTEMS INC·Filed 1996·Granted Aug 18, 1998·37 cites·33 claims
- 2568US5723019ADrip chemical delivery method and apparatusONTRAK SYSTEMS INC·Filed 1996·Granted Mar 3, 1998·32 cites·20 claims
- 2666US5924154ABrush assembly apparatusONTRAK SYSTEMS INC·Filed 1996·Granted Jul 20, 1999·28 cites·22 claims
- 2763US5862560ARoller with treading and system including the sameONTRAK SYSTEMS INC·Filed 1996·Granted Jan 26, 1999·27 cites·18 claims
- 2862US6059889AMethod for processing a substrate using a system having a roller with treadingONTRAK SYSTEMS INC·Filed 1999·Granted May 9, 2000·25 cites·5 claims
- 2961US5853522ADrip chemical delivery apparatusONTRAK SYSTEMS INC·Filed 1996·Granted Dec 29, 1998·22 cites·22 claims
- 3061US5529638AMethod for wafer scrubbingONTRAK SYSTEMS INC·Filed 1995·Granted Jun 25, 1996·30 cites·3 claims
- 3158US5840129AHesitation free rollerONTRAK SYSTEMS INC·Filed 1996·Granted Nov 24, 1998·22 cites·7 claims
- 3252US5606251AMethod and apparatus for detecting a substrate in a substrate processing systemONTRAK SYSTEMS INC·Filed 1994·Granted Feb 25, 1997·24 cites·14 claims
- 3352US5548505AScrubber control systemONTRAK SYSTEMS INC·Filed 1994·Granted Aug 20, 1996·14 cites·7 claims
- 3450US6003185AHesitation free rollerONTRAK SYSTEMS INC·Filed 1996·Granted Dec 21, 1999·16 cites·38 claims
- 3538US5809832ARoller positioning apparatusONTRAK SYSTEMS INC·Filed 1996·Granted Sep 22, 1998·7 cites·24 claims
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