Assignee
ONE SEMICON CO LTD
KR·0 granted patents·3 pending applications·0 citations·filing 2020–2022
Top patents by PatentIndex Score
3 records- 0153US2022139661A1Manufacturing method of plasma focus ring for semiconductor etching apparatusONE SEMICON CO LTD·Filed 2022·Application pending·0 cites
- 0247US2022415621A1Focus ring for improvement of semiconductor plasma etching processONE SEMICON CO LTD·Filed 2022·Application pending·0 cites
- 0345US2020312635A1Plasma focus ring of semiconductor etching apparatus and manufacturing method thereofONE SEMICON CO LTD·Filed 2020·Application pending·0 cites
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