Assignee
OKABE TSUTOMU
JP·13 granted patents·130 citations·filing 2008–2012
Top patents by PatentIndex Score
13 records- 0195US8082955B2Lid opening/closing system of an airtight containerOKABE TSUTOMU·Filed 2010·Granted Dec 27, 2011·17 cites·7 claims
- 0294US8522836B2Substrate storage pod with replacement function of clean gasOKABE TSUTOMU·Filed 2011·Granted Sep 3, 2013·18 cites·8 claims
- 0392US8302637B2Method of processing an object in a container and lid opening/closing system used in the methodOKABE TSUTOMU·Filed 2008·Granted Nov 6, 2012·27 cites·7 claims
- 0492US8186927B2Contained object transfer systemOKABE TSUTOMU·Filed 2009·Granted May 29, 2012·20 cites·6 claims
- 0589US8171964B2Apparatus and method for opening/closing lid of closed container, gas replacement apparatus using same, and load port apparatusOKABE TSUTOMU·Filed 2009·Granted May 8, 2012·15 cites·3 claims
- 0688US8061738B2Gas replacement systemOKABE TSUTOMU·Filed 2009·Granted Nov 22, 2011·12 cites·1 claims
- 0787US8893753B2Substrate storage pod and lid member thereof, and processing apparatus for a substrateOKABE TSUTOMU·Filed 2011·Granted Nov 25, 2014·8 cites·12 claims
- 0884US8413693B2Lid opening/closing system of an airtight containerOKABE TSUTOMU·Filed 2012·Granted Apr 9, 2013·4 cites·2 claims
- 0970US9349627B2Lid opening/closing system for closed container and substrate processing method using sameOKABE TSUTOMU·Filed 2010·Granted May 24, 2016·2 cites·6 claims
- 1067US8657346B2Lid opening/closing system for closed containerOKABE TSUTOMU·Filed 2009·Granted Feb 25, 2014·2 cites·14 claims
- 1167US8322759B2Closed container and lid opening/closing system thereforOKABE TSUTOMU·Filed 2009·Granted Dec 4, 2012·4 cites·9 claims
- 1262US8083456B2Contained object transfer systemOKABE TSUTOMU·Filed 2008·Granted Dec 27, 2011·1 cites·7 claims
- 1342US9401295B2Load port apparatus and clamping device to be used for the sameOKABE TSUTOMU·Filed 2012·Granted Jul 26, 2016·0 cites·10 claims
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