Assignee
OHARA TETSUO
4 granted patents·27 citations·filing 2005–2013
Top patents by PatentIndex Score
4 records- 0193US7430484B2Signal processing method and apparatus for use in real-time subnanometer scale position measurements with the aid of probing sensors and beams scanning periodically undulating surfaces such as gratings and diffraction patterns generated thereby, and the likeOHARA TETSUO·Filed 2006·Granted Sep 30, 2008·21 cites·27 claims
- 0278US9464882B2Interferometer with continuously varying path length measured in wavelengths to the reference mirrorOHARA TETSUO·Filed 2013·Granted Oct 11, 2016·5 cites·18 claims
- 0365US8076608B2Energy collection and power reduction in laser coupling processOHARA TETSUO·Filed 2008·Granted Dec 13, 2011·1 cites·6 claims
- 0452US8455789B2Energy collection and power reduction in laser coupling processOHARA TETSUO·Filed 2005·Granted Jun 4, 2013·0 cites·25 claims
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