Assignee
OH CHANG-SUK
KR·3 granted patents·24 citations·filing 2008–2008
Top patents by PatentIndex Score
3 records- 0181US8113141B2Apparatus for processing a substrateOH CHANG-SUK·Filed 2008·Granted Feb 14, 2012·13 cites·22 claims
- 0280US8113142B2Apparatus for processing a substrateOH CHANG-SUK·Filed 2008·Granted Feb 14, 2012·11 cites·19 claims
- 0346US8115142B2Plate, apparatus for adjusting temperature of substrate having the plate and apparatus for processing substrate having the plateOH CHANG-SUK·Filed 2008·Granted Feb 14, 2012·0 cites·20 claims
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