Assignee
OGAWA ARITO
JP·4 granted patents·21 citations·filing 2010–2012
Top patents by PatentIndex Score
4 records- 0185US8404603B2Method of manufacturing semiconductor device and substrate processing systemOGAWA ARITO·Filed 2010·Granted Mar 26, 2013·8 cites·20 claims
- 0283US8994124B2Semiconductor device, method of manufacturing semiconductor device and system of processing substrateOGAWA ARITO·Filed 2012·Granted Mar 31, 2015·5 cites·20 claims
- 0382US8951912B2Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and computer-readable recording mediumOGAWA ARITO·Filed 2012·Granted Feb 10, 2015·4 cites·16 claims
- 0477US8937022B2Method of manufacturing semiconductor device, substrate processing method and substrate processing apparatusOGAWA ARITO·Filed 2011·Granted Jan 20, 2015·4 cites·10 claims
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