Assignee
OBSIDIAN INC
US·8 granted patents·766 citations·filing 1995–1997
Top patents by PatentIndex Score
8 records- 0194US6110025AContainment ring for substrate carrier apparatusOBSIDIAN INC·Filed 1997·Granted Aug 29, 2000·146 cites·28 claims
- 0294US5759918AMethod for chemical mechanical polishingOBSIDIAN INC·Filed 1996·Granted Jun 2, 1998·198 cites·23 claims
- 0391US5938884AApparatus for chemical mechanical polishingOBSIDIAN INC·Filed 1997·Granted Aug 17, 1999·80 cites·18 claims
- 0490US5851136AApparatus for chemical mechanical polishingOBSIDIAN INC·Filed 1997·Granted Dec 22, 1998·66 cites·15 claims
- 0589US5908530AApparatus for chemical mechanical polishingOBSIDIAN INC·Filed 1995·Granted Jun 1, 1999·106 cites·25 claims
- 0687US6113479AWafer carrier for chemical mechanical planarization polishingOBSIDIAN INC·Filed 1997·Granted Sep 5, 2000·67 cites·29 claims
- 0786US5899798ALow profile, low hysteresis force feedback gimbal system for chemical mechanical polishingOBSIDIAN INC·Filed 1997·Granted May 4, 1999·72 cites·22 claims
- 0869US6196896B1Chemical mechanical polisherOBSIDIAN INC·Filed 1997·Granted Mar 6, 2001·31 cites·50 claims
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