Assignee

NOVA MEASURING INSTR INC

US·28 granted patents·10 pending applications·36 citations·filing 2016–2025

Technology mixG01N36 H10P26 H01L22 G01B14 H01J13 G01Q7

Top patents by PatentIndex Score

38 records

0195US10119925B2Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)NOVA MEASURING INSTR INC·Filed 2017·Granted Nov 6, 2018·7 cites·25 claims
0292US10481112B2Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)NOVA MEASURING INSTR INC·Filed 2018·Granted Nov 19, 2019·4 cites·20 claims
0391US11029148B2Feed-forward of multi-layer and multi-process information using XPS and XRF technologiesNOVA MEASURING INSTR INC·Filed 2020·Granted Jun 8, 2021·2 cites·20 claims
0491US10859519B2Methods and systems for measuring periodic structures using multi-angle x-ray reflectance scatterometry (XRS)NOVA MEASURING INSTR INC·Filed 2019·Granted Dec 8, 2020·3 cites·25 claims
0591US10533961B2Method and system for non-destructive metrology of thin layersNOVA MEASURING INSTR INC·Filed 2016·Granted Jan 14, 2020·5 cites·18 claims
0691US10056242B2Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometryNOVA MEASURING INSTR INC·Filed 2016·Granted Aug 21, 2018·5 cites·13 claims
0790US11996259B2Patterned x-ray emitting targetNOVA MEASURING INSTR INC·Filed 2020·Granted May 28, 2024·2 cites·16 claims
0890US2026079122A1System and method for measuring a sample by x-ray reflectance scatterometryNOVA MEASURING INSTR INC·Filed 2025·Application pending·0 cites
0989US11183377B2Mass spectrometer detector and system and method using the sameNOVA MEASURING INSTR INC·Filed 2017·Granted Nov 23, 2021·6 cites·19 claims
1089US10648802B2Feed-forward of multi-layer and multi-process information using XPS and XRF technologiesNOVA MEASURING INSTR INC·Filed 2019·Granted May 12, 2020·2 cites·20 claims
1188US12360063B2System and method for measuring a sample by x-ray reflectance scatterometryNOVA MEASURING INSTR INC·Filed 2024·Granted Jul 15, 2025·0 cites·20 claims
1288US2025052704A1Method and system for non-destructive metrology of thin layersNOVA MEASURING INSTR INC·Filed 2024·Application pending·0 cites
1386US12165863B2Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometryNOVA MEASURING INSTR INC·Filed 2023·Granted Dec 10, 2024·0 cites·18 claims
1485US12066391B2Method and system for non-destructive metrology of thin layersNOVA MEASURING INSTR INC·Filed 2023·Granted Aug 20, 2024·0 cites·20 claims
1583US12158437B2XPS metrology for process control in selective depositionNOVA MEASURING INSTR INC·Filed 2023·Granted Dec 3, 2024·0 cites·12 claims
1682US11764050B2Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometryNOVA MEASURING INSTR INC·Filed 2022·Granted Sep 19, 2023·0 cites·20 claims
1781US2024085174A1Feed-forward of multi-layer and multi-process information using xps and xrf technologiesNOVA MEASURING INSTR INC·Filed 2023·Application pending·0 cites
1878US11680915B2XPS metrology for process control in selective depositionNOVA MEASURING INSTR INC·Filed 2022·Granted Jun 20, 2023·0 cites·19 claims
1977US12281893B2Characterizing and measuring in small boxes using XPS with multiple measurementsNOVA MEASURING INSTR INC·Filed 2024·Granted Apr 22, 2025·0 cites·20 claims
2076US11430647B2Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass SpectrometryNOVA MEASURING INSTR INC·Filed 2021·Granted Aug 30, 2022·0 cites·21 claims
2173US11733035B2Feed-forward of multi-layer and multi-process information using XPS and XRF technologiesNOVA MEASURING INSTR INC·Filed 2021·Granted Aug 22, 2023·0 cites·7 claims
2273US10910208B2Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometryNOVA MEASURING INSTR INC·Filed 2020·Granted Feb 2, 2021·0 cites·20 claims
2372US11874237B2System and method for measuring a sample by x-ray reflectance scatterometryNOVA MEASURING INSTR INC·Filed 2020·Granted Jan 16, 2024·0 cites·19 claims
2472US11823883B2Mass spectrometer detector and system and method using the sameNOVA MEASURING INSTR INC·Filed 2021·Granted Nov 21, 2023·0 cites·7 claims
2572US11668663B2Method and system for non-destructive metrology of thin layersNOVA MEASURING INSTR INC·Filed 2020·Granted Jun 6, 2023·0 cites·10 claims
2671US11988502B2Characterizing and measuring in small boxes using XPS with multiple measurementsNOVA MEASURING INSTR INC·Filed 2022·Granted May 21, 2024·0 cites·17 claims
2771US11346795B2XPS metrology for process control in selective depositionNOVA MEASURING INSTR INC·Filed 2020·Granted May 31, 2022·0 cites·20 claims
2871US2025314487A1Characterizing and measuring in small boxes using xps with multiple measurementsNOVA MEASURING INSTR INC·Filed 2025·Application pending·0 cites
2969US10636644B2Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometryNOVA MEASURING INSTR INC·Filed 2019·Granted Apr 28, 2020·0 cites·7 claims
3069US2019033069A1Feed-forward of multi-layer and multi-process information using xps and xrf technologiesNOVA MEASURING INSTR INC·Filed 2018·Application pending·0 cites
3167US2024167814A1Method and system for monitoring deposition processNOVA MEASURING INSTR INC·Filed 2023·Application pending·0 cites
3266US10403489B2Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometryNOVA MEASURING INSTR INC·Filed 2018·Granted Sep 3, 2019·0 cites·22 claims
3365US2026098824A1A high brightness primary x-ray source for in-line xps and xrf metrologyNOVA MEASURING INSTR INC·Filed 2023·Application pending·0 cites
3464US10801978B2XPS metrology for process control in selective depositionNOVA MEASURING INSTR INC·Filed 2019·Granted Oct 13, 2020·0 cites·22 claims
3563US2025006451A1Patterned x-ray emitting targetNOVA MEASURING INSTR INC·Filed 2024·Application pending·0 cites
3659US2025067691A1Production solutions for high-throughput/precision xps metrology using unsupervised machine learningNOVA MEASURING INSTR INC·Filed 2022·Application pending·0 cites
3758US2026029359A1Adaptive count rate modulation to increase depth profile dynamic range in secondary ion mass spectroscopyNOVA MEASURING INSTR INC·Filed 2022·Application pending·0 cites
3853US11852467B2Method and system for monitoring deposition processNOVA MEASURING INSTR INC·Filed 2020·Granted Dec 26, 2023·0 cites·18 claims

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