Assignee
NANMAT TECHNOLOGY CO LTD
TW·1 granted patent·3 pending applications·2 citations·filing 2002–2013
Top patents by PatentIndex Score
4 records- 0146US6734686B2Method for detecting quantity variation of high purity liquid chemicals and devices to carry out the methodNANMAT TECHNOLOGY CO LTD·Filed 2002·Granted May 11, 2004·2 cites·10 claims
- 0236US2014072479A1Delivery Equipment for the Solid Precursor ParticlesNANMAT TECHNOLOGY CO LTD·Filed 2012·Application pending·0 cites
- 0334US2013143402A1Method of forming Cu thin filmNANMAT TECHNOLOGY CO LTD·Filed 2013·Application pending·0 cites
- 0426US2004168712A1Method for cleaning semiconductor manufacturing systemNANMAT TECHNOLOGY CO LTD·Filed 2004·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →