Assignee
MULTIBEAM SYSTEMS INC
US·14 granted patents·650 citations·filing 2000–2006
Top patents by PatentIndex Score
14 records- 0198US6844550B1Multi-beam multi-column electron beam inspection systemMULTIBEAM SYSTEMS INC·Filed 2003·Granted Jan 18, 2005·142 cites·17 claims
- 0296US6617587B2Electron optics for multi-beam electron beam lithography toolMULTIBEAM SYSTEMS INC·Filed 2002·Granted Sep 9, 2003·104 cites·6 claims
- 0394US7435956B2Apparatus and method for inspection and testing of flat panel display substratesMULTIBEAM SYSTEMS INC·Filed 2005·Granted Oct 14, 2008·23 cites·28 claims
- 0494US7227142B2Dual detector optics for simultaneous collection of secondary and backscattered electronsMULTIBEAM SYSTEMS INC·Filed 2005·Granted Jun 5, 2007·21 cites·22 claims
- 0594US6355994B1Precision stageMULTIBEAM SYSTEMS INC·Filed 2000·Granted Mar 12, 2002·81 cites·37 claims
- 0693US6977375B2Multi-beam multi-column electron beam inspection systemMULTIBEAM SYSTEMS INC·Filed 2001·Granted Dec 20, 2005·47 cites·29 claims
- 0793US6734428B2Multi-beam multi-column electron beam inspection systemMULTIBEAM SYSTEMS INC·Filed 2002·Granted May 11, 2004·51 cites·19 claims
- 0890US7456402B2Detector optics for multiple electron beam test systemMULTIBEAM SYSTEMS INC·Filed 2006·Granted Nov 25, 2008·15 cites·25 claims
- 0989US7462848B2Optics for generation of high current density patterned charged particle beamsMULTIBEAM SYSTEMS INC·Filed 2004·Granted Dec 9, 2008·27 cites·44 claims
- 1088US6943351B2Multi-column charged particle optics assemblyMULTIBEAM SYSTEMS INC·Filed 2004·Granted Sep 13, 2005·43 cites·20 claims
- 1186US7122795B2Detector optics for charged particle beam inspection systemMULTIBEAM SYSTEMS INC·Filed 2004·Granted Oct 17, 2006·22 cites·22 claims
- 1285US6872958B2Platform positioning systemMULTIBEAM SYSTEMS INC·Filed 2002·Granted Mar 29, 2005·31 cites·23 claims
- 1376US6471435B1Flexural jointMULTIBEAM SYSTEMS INC·Filed 2000·Granted Oct 29, 2002·19 cites·4 claims
- 1473US6738506B2Image processing system for multi-beam inspectionMULTIBEAM SYSTEMS INC·Filed 2002·Granted May 18, 2004·24 cites·30 claims
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