Assignee
MORI MASAHITO
JP·2 granted patents·2 pending applications·18 citations·filing 2008–2012
Top patents by PatentIndex Score
4 records- 0192US8546266B2Plasma processing method and plasma processing apparatusMORI MASAHITO·Filed 2011·Granted Oct 1, 2013·12 cites·5 claims
- 0282US8129283B2Plasma processing method and plasma processing apparatusMORI MASAHITO·Filed 2008·Granted Mar 6, 2012·6 cites·4 claims
- 0348US2010258529A1Plasma Processing Apparatus and Plasma Processing MethodMORI MASAHITO·Filed 2009·Application pending·0 cites
- 0443US2013228550A1Dry etching apparatus and methodMORI MASAHITO·Filed 2012·Application pending·0 cites
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