Assignee
MKS INSTR
US·6 granted patents·2 pending applications·85 citations·filing 1999–2018
Top patents by PatentIndex Score
8 records- 0187US7316163B2Method of forming a seal between a housing and a diaphragm of a capacitance sensorMKS INSTR·Filed 2006·Granted Jan 8, 2008·18 cites·25 claims
- 0284US7385798B2Multiple sensor feedback for controlling multiple ionizersMKS INSTR·Filed 2007·Granted Jun 10, 2008·10 cites·37 claims
- 0382US7389697B2Pressure sensor for detecting small pressure differences and low pressuresMKS INSTR·Filed 2005·Granted Jun 24, 2008·16 cites·20 claims
- 0478US6439056B1Sensor element having temperature measuring meansMKS INSTR·Filed 1999·Granted Aug 27, 2002·41 cites·20 claims
- 0560US11262340B2Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of useMKS INSTR·Filed 2018·Granted Mar 1, 2022·0 cites·7 claims
- 0653US9796603B2Pressure-less ozonated di-water (DIO3) recirculation reclaim systemMKS INSTR·Filed 2017·Granted Oct 24, 2017·0 cites·23 claims
- 0745US2009316325A1Silicon emitters for ionizers with high frequency waveformsMKS INSTR·Filed 2009·Application pending·0 cites
- 0830US2004099061A1Pressure sensor for detecting small pressure differences and low pressuresMKS INSTR·Filed 2003·Application pending·0 cites
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