Assignee
MIYAZAKI MITSURU
JP·1 granted patent·1 pending application·22 citations·filing 2007–2009
Top patents by PatentIndex Score
2 records- 0192US8795032B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodMIYAZAKI MITSURU·Filed 2009·Granted Aug 5, 2014·22 cites·14 claims
- 0240US2007214620A1Substrate processing apparatus and substrate processing methodMIYAZAKI MITSURU·Filed 2007·Application pending·0 cites
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