Assignee
MINODA KEN
JP·4 granted patents·38 citations·filing 2009–2012
Top patents by PatentIndex Score
4 records- 0196US8842294B2Position detection apparatus, imprint apparatus, and position detection methodMINODA KEN·Filed 2012·Granted Sep 23, 2014·25 cites·21 claims
- 0286US8672661B2Imprint apparatus and article manufacturing methodMINODA KEN·Filed 2012·Granted Mar 18, 2014·7 cites·10 claims
- 0380US8854605B2Illumination optical system, exposure apparatus, and device fabrication methodMINODA KEN·Filed 2010·Granted Oct 7, 2014·4 cites·8 claims
- 0466US8305560B2Exposure apparatus, device manufacturing method, and aperture stop manufacturing methodMINODA KEN·Filed 2009·Granted Nov 6, 2012·2 cites·15 claims
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