Assignee
MIMASU SEMICONDUCTOR IND CO
JP·4 granted patents·7 pending applications·119 citations·filing 2000–2009
Top patents by PatentIndex Score
11 records- 0186US6810888B2Wafer rotary holding apparatus and wafer surface treatment apparatus with waste liquid recovery mechanismMIMASU SEMICONDUCTOR IND CO·Filed 2003·Granted Nov 2, 2004·49 cites·4 claims
- 0286US6672318B1Wafer rotary holding apparatus and wafer surface treatment apparatus with waste liquid recovery mechanismMIMASU SEMICONDUCTOR IND CO·Filed 2000·Granted Jan 6, 2004·51 cites·19 claims
- 0363US7364616B2Wafer demounting method, wafer demounting device, and wafer demounting and transferring machineMIMASU SEMICONDUCTOR IND CO·Filed 2003·Granted Apr 29, 2008·11 cites·16 claims
- 0460US7659212B2Process control method in spin etching and spin etching apparatusMIMASU SEMICONDUCTOR IND CO·Filed 2004·Granted Feb 9, 2010·8 cites·6 claims
- 0552US2010101726A1Process control method in spin etching and spin etching apparatusMIMASU SEMICONDUCTOR IND CO·Filed 2009·Application pending·0 cites
- 0650US2010269903A1Process for producing polycrystalline silicon substrate and polycrystalline silicon substrateMIMASU SEMICONDUCTOR IND CO·Filed 2008·Application pending·0 cites
- 0746US2009166780A1Process for producing semiconductor substrate, semiconductor substrate for solar application and etching solutionMIMASU SEMICONDUCTOR IND CO·Filed 2009·Application pending·0 cites
- 0840US2009266414A1Process for producing semiconductor substrate, semiconductor substrate for solar application and etching solutionMIMASU SEMICONDUCTOR IND CO·Filed 2007·Application pending·0 cites
- 0936US2008128085A1Surface Treating Apparatus For Square Wafer For Solar BatteryMIMASU SEMICONDUCTOR IND CO·Filed 2004·Application pending·0 cites
- 1036US2009032188A1Single-wafer processorMIMASU SEMICONDUCTOR IND CO·Filed 2004·Application pending·0 cites
- 1136US2009032498A1Spin Processing Method And ApparatusMIMASU SEMICONDUCTOR IND CO·Filed 2005·Application pending·0 cites
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