Assignee
MICROMATERIALS LLC
US·30 granted patents·5 pending applications·146 citations·filing 2017–2022
Top patents by PatentIndex Score
35 records- 0198US11597989B2Apparatus and methods for depositing molten metal onto a foil substrateMICROMATERIALS LLC·Filed 2022·Granted Mar 7, 2023·5 cites·20 claims
- 0298US11049695B2Metal contact landing structureMICROMATERIALS LLC·Filed 2020·Granted Jun 29, 2021·8 cites·18 claims
- 0397US10720341B2Gas delivery system for high pressure processing chamberMICROMATERIALS LLC·Filed 2018·Granted Jul 21, 2020·20 cites·9 claims
- 0497US10529603B2High pressure wafer processing systems and related methodsMICROMATERIALS LLC·Filed 2019·Granted Jan 7, 2020·20 cites·20 claims
- 0597US10224224B2High pressure wafer processing systems and related methodsMICROMATERIALS LLC·Filed 2017·Granted Mar 5, 2019·19 cites·24 claims
- 0697US10179941B1Gas delivery system for high pressure processing chamberMICROMATERIALS LLC·Filed 2017·Granted Jan 15, 2019·29 cites·18 claims
- 0794US11597988B2Apparatus and methods for depositing molten metal onto a foil substrateMICROMATERIALS LLC·Filed 2022·Granted Mar 7, 2023·1 cites·20 claims
- 0894US10510540B2Mask scheme for cut pattern flow with enlarged EPE windowMICROMATERIALS LLC·Filed 2018·Granted Dec 17, 2019·11 cites·20 claims
- 0991US11527421B2Gas delivery system for high pressure processing chamberMICROMATERIALS LLC·Filed 2020·Granted Dec 13, 2022·2 cites·17 claims
- 1090US10424507B2Fully self-aligned viaMICROMATERIALS LLC·Filed 2017·Granted Sep 24, 2019·5 cites·13 claims
- 1189US10600688B2Methods of producing self-aligned viasMICROMATERIALS LLC·Filed 2018·Granted Mar 24, 2020·6 cites·17 claims
- 1288US10692728B2Use of selective aluminum oxide etchMICROMATERIALS LLC·Filed 2018·Granted Jun 23, 2020·5 cites·17 claims
- 1387US10553485B2Methods of producing fully self-aligned vias and contactsMICROMATERIALS LLC·Filed 2018·Granted Feb 4, 2020·5 cites·14 claims
- 1485US11384419B2Apparatus and methods for depositing molten metal onto a foil substrateMICROMATERIALS LLC·Filed 2020·Granted Jul 12, 2022·1 cites·21 claims
- 1582US10790191B2Selective removal process to create high aspect ratio fully self-aligned viaMICROMATERIALS LLC·Filed 2019·Granted Sep 29, 2020·3 cites·15 claims
- 1679US11756803B2Gas delivery system for high pressure processing chamberMICROMATERIALS LLC·Filed 2022·Granted Sep 12, 2023·0 cites·20 claims
- 1779US11437274B2Fully self-aligned viaMICROMATERIALS LLC·Filed 2020·Granted Sep 6, 2022·1 cites·9 claims
- 1876US10593594B2Selectively etched self-aligned via processesMICROMATERIALS LLC·Filed 2018·Granted Mar 17, 2020·2 cites·20 claims
- 1975US10892187B2Method for creating a fully self-aligned viaMICROMATERIALS LLC·Filed 2019·Granted Jan 12, 2021·2 cites·13 claims
- 2069US10699953B2Method for creating a fully self-aligned viaMICROMATERIALS LLC·Filed 2019·Granted Jun 30, 2020·1 cites·20 claims
- 2163US11705366B2Methods for controllable metal and barrier-liner recessMICROMATERIALS LLC·Filed 2021·Granted Jul 18, 2023·0 cites·5 claims
- 2263US10522404B2Fully self-aligned viaMICROMATERIALS LLC·Filed 2019·Granted Dec 31, 2019·0 cites·6 claims
- 2363US2022359289A1Fully self-aligned viaMICROMATERIALS LLC·Filed 2022·Application pending·0 cites
- 2462US10410921B2Fully self-aligned viaMICROMATERIALS LLC·Filed 2019·Granted Sep 10, 2019·0 cites·14 claims
- 2562US2022367270A1Self-aligned contact and contact over active gate structuresMICROMATERIALS LLC·Filed 2022·Application pending·0 cites
- 2661US11164938B2DRAM capacitor moduleMICROMATERIALS LLC·Filed 2020·Granted Nov 2, 2021·0 cites·16 claims
- 2761US2022013624A1DRAM Capacitor ModuleMICROMATERIALS LLC·Filed 2021·Application pending·0 cites
- 2860US11037825B2Selective removal process to create high aspect ratio fully self-aligned viaMICROMATERIALS LLC·Filed 2020·Granted Jun 15, 2021·0 cites·10 claims
- 2954US11062942B2Methods for controllable metal and barrier-liner recessMICROMATERIALS LLC·Filed 2018·Granted Jul 13, 2021·0 cites·8 claims
- 3054US2019119769A1Gas delivery system for high pressure processing chamberMICROMATERIALS LLC·Filed 2018·Application pending·0 cites
- 3152US11114333B2Method for depositing and reflow of a high quality etch resistant gapfill dielectric filmMICROMATERIALS LLC·Filed 2019·Granted Sep 7, 2021·0 cites·20 claims
- 3246US10892183B2Methods for removing metal oxidesMICROMATERIALS LLC·Filed 2019·Granted Jan 12, 2021·0 cites·16 claims
- 3344US10573555B2Methods of producing self-aligned grown viaMICROMATERIALS LLC·Filed 2018·Granted Feb 25, 2020·0 cites·16 claims
- 3443US10510602B2Methods of producing self-aligned viasMICROMATERIALS LLC·Filed 2018·Granted Dec 17, 2019·0 cites·20 claims
- 3542US2019355621A1Method For Increasing The Verticality Of PillarsMICROMATERIALS LLC·Filed 2019·Application pending·0 cites
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