Assignee
MICRO PROC TECHNOLOGY INC
US·6 granted patents·91 citations·filing 2003–2013
Top patents by PatentIndex Score
6 records- 0187US9153493B1System for separating devices from a semiconductor waferMICRO PROC TECHNOLOGY INC·Filed 2013·Granted Oct 6, 2015·9 cites·9 claims
- 0286US7165331B1Apparatus and method for scribing a semiconductor wafer while controlling scribing forcesMICRO PROC TECHNOLOGY INC·Filed 2005·Granted Jan 23, 2007·16 cites·12 claims
- 0384US7392732B2Scribing tool and methodMICRO PROC TECHNOLOGY INC·Filed 2005·Granted Jul 1, 2008·15 cites·20 claims
- 0483US7807479B1Method and apparatus for improving force control in wafer scribingMICRO PROC TECHNOLOGY INC·Filed 2007·Granted Oct 5, 2010·10 cites·9 claims
- 0583US6826840B1Semiconductor wafer scribing systemMICRO PROC TECHNOLOGY INC·Filed 2003·Granted Dec 7, 2004·36 cites·25 claims
- 0675US7415916B2Scribing system with particle removerMICRO PROC TECHNOLOGY INC·Filed 2006·Granted Aug 26, 2008·5 cites·9 claims
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